Cyclic scheduling of cluster tools with non-identical chamber access times

Proceedings - Winter Simulation Conference

Volumn , Issue , 2011, Pages 2068-2079

  Kim, Dae Kyu ^a   Jung, Chihyun ^a   Lee, Tae Eog ^a   Jung, Yu Ju ^b  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

^b POSCO   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CLOSED-FORM FORMULAE; CLUSTER TOOL; CYCLE TIME; CYCLIC SCHEDULING; CYCLIC SCHEDULING PROBLEMS; OPTIMAL SCHEDULING; PETRI NET MODELS; PROCESS STEPS; WORK CYCLE;

OPTIMIZATION; PETRI NETS; SCHEDULING;

TOOLS;

EID: 84863232177     PISSN: 08917736     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/WSC.2011.6147920     Document Type: Conference Paper

References (12)

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