A 1.4μm front-side illuminated image sensor with novel light guiding structure consisting of stacked lightpipes

Technical Digest - International Electron Devices Meeting, IEDM

Volumn , Issue , 2011, Pages

  Watanabe, Hisashi ^a   Hirai, Jun ^a   Katsuno, Motonari ^a   Tachikawa, Keishi ^a   Tsuji, Sho ^a   Kataoka, Masao ^a   Kawagishi, Saori ^a   Kubo, Hiroko ^a   Yano, Hisashi ^a   Suzuki, Shigeru ^a   Okazaki, Gen ^a   Yamamoto, Kouichi ^a   Fujinaka, Hiroshi ^a   Fujioka, Takashi ^a   Suzuki, Masakatsu ^a  

^a PANASONIC CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

300 MM WAFERS; BACKSIDE-ILLUMINATED; HIGH QUANTUM EFFICIENCY; ILLUMINATED IMAGES; INCIDENT ANGLES; LIGHT GUIDING; LIGHTPIPES;

ELECTRON DEVICES;

SENSORS;

EID: 84863023363     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IEDM.2011.6131513     Document Type: Conference Paper

References (4)

1. H. Rhodes, et al., 2011 Int. Image Sensor Workshop, p.28, 2011
2. K. Lee, et al., 2011 Int. Image Sensor Workshop, p.9, 2011
3. H. Wakabayashi, et al., Solid-State Circuits Conference Digest of Technical Papers, 2010, pp. 410-411, 2010
4. W. N. Ye, et al., Proceedings of the SPIE, Volume 7591, pp. 75910D1-D8 (2010). SmartFSI is a trademark of Panasonic.