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Volumn 12, Issue 6, 2012, Pages 3158-3161

Nanoscale etching and flattening of metals with ozone water

Author keywords

atomically flat; green chemistry; Metal etching; ozone water

Indexed keywords

ATOMICALLY FLAT; DISSOLVED OZONE; ENVIRONMENTALLY-FRIENDLY; ETCHED SURFACE; ETCHING RATE; GREEN CHEMISTRY; METAL ETCHING; NANO SCALE; OZONE CONCENTRATION;

EID: 84862279532     PISSN: 15306984     EISSN: 15306992     Source Type: Journal    
DOI: 10.1021/nl301112r     Document Type: Article
Times cited : (6)

References (12)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.