Thin films and microelectrode arrays for neuroprosthetics

MRS Bulletin

Volumn 37, Issue 6, 2012, Pages 590-598

  Ordonez, Juan ^a   Schuettler, Martin ^a   Boehler, Christian ^a   Boretius, Tim ^a   Stieglitz, Thomas ^a  

^a UNIVERSITY OF FREIBURG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION PROMOTION; APPLICATION EXAMPLES; BIO-ELECTRICAL ACTIVITY; ELECTRICAL AND MECHANICAL PROPERTIES; ELECTRODE ARRAYS; ELECTRONIC DEVICE; INSULATION LAYERS; MECHANICAL AND ELECTRICAL PROPERTIES; MICROELECTRODE ARRAY; NEUROPROSTHETICS; PARYLENE C; THIN FILM LAYERS;

ADHESION; MECHANICAL PROPERTIES; POLYIMIDES; SILICON CARBIDE; SILICONES; THIN FILM DEVICES; THIN FILMS;

ELECTRIC PROPERTIES;

EID: 84861987673     PISSN: 08837694     EISSN: None     Source Type: Journal    
DOI: 10.1557/mrs.2012.117     Document Type: Review

References (135)

1. H. Kern, C. Hofer, M. Mödlin, C. Forstner, D. Raschka-Högler, W. Mayr, H. Stöhr, Artif. Organs 26, 216 (2002).
2. G.S. Brindley, Paraplegia 33, 5 (1995).
3. N. Donaldson, 2nd Vienna International Workshop on FES (1986), pp. 197-200.
4. P.N. Taylor, J.H. Burridge, A.L. Dunkerley, D.E. Wood, J.A. Norton, C. Singleton, Arch. Phys. Med. Rehabil. 80, 1577 (1999).
5. J.H. Burridge, M. Haugland, B. Larsen, N. Svaneborg, H.K. Iversen, P.B. Christensen, R.M. Pickering, T. Sinkjaer, J. Rehabil. Med. 40, 873 (2008).
6. J.H. Burridge, T. Sinkjaer, B. Larsen, M. Haugland, R.M. Pickering, J. Rehabil. Med. 39, 212 (2007).
7. G. Clark, Cochlear Implants-Fundamentals and Applications (Springer, NY, 2003).
8. T. Stieglitz, J. Neural Eng. 6 (065005) (2009).
9. S. Kelly, D.B. Shire, J. Chen, P. Doyle, M.D. Gingerich, W.A. Drohan, L.S. Theogarajan, S.F. Cogan, J.L. Wyatt, J.F. Rizzo III, 2nd International Symposium on Applied Sciences in Biomedical and Communication Technologies (2009), pp. 1-6.
10. E.M. Maynard, Annu. Rev. Biomed. Eng. 3, 145 (2001).
11. G.J. Suaning, N.H. Lovell, K. Schindhelm, M.T. Coroneo, Aust. New Zeal. J. Ophthalmol. 26, 195 (1998).
12. J. Weiland, IEEE Eng. Med. Biol. Mag. 25, 60 (2006).
13. M.S. Humayun, J.D. Dorn, A.K. Ahuja, A. Caspi, E. Filley, G. Dagnelie, J. Salzmann, A. Santos, J. Duncan, L. daCruz, Annual International Conference of the IEEE Engineering in Medicine and Biology Society (2009), p. 4566.
14. Argus II, Second Sight Medical Products, CA, USA ; http ://2-sight. eu/en/home-en.
15. G.C. Albert, C.M. Cook, F.S. Prato, A.W. Thomas, Neurosci. Biobehav. Rev. 33, 1042 (2009).
16. D.A. Groves, V.J. Brown, Neurosci. Biobehav. Rev. 29, 493 (2005).
17. L. Hotujac, M. Rojnic Kuzman, Neuro Endocrinol. Lett. 29, 133 (2008).
18. A.P. Amar, Expert Rev. Neurother. 7, 1763 (2007).
19. T. Stieglitz, Int. J. Micro-Nano Scale Transport 1, 139 (2010).
20. P.G. Patil D.A. Turner, Neurotherapeutics 5, 137 (2008).
21. C. Toledo, L. Leija, R. Munoz, A. Vera, A. Ramirez, Pan American Health Care Exchanges PAHCE 2009 (2009), pp. 104-108.
22. J.P. Donoghue, Nat. Neurosci. 5, 1085 (2002).
23. T. Stieglitz, B. Rubehn, C. Henle, S. Kisban, S. Herwik, P. Ruther, M. Schuettler, Prog. Brain Res. 175, 297 (2009).
24. D.D. Zhou, E. Greenbaum, Implantable Neural Prostheses 1: Devices and Applications (Springer, NY, 2009), vol. 1.
25. D.D. Zhou, E. Greenbaum, Implantable Neural Prostheses 2: Techniques and Engineering Approaches (Springer, NY, 2010), vol. 2.
26. C. Hassler, T. Boretius, T. Stieglitz, J. Polym. Sci., Part B: Polym. Phys. 49, 18 (2011).
27. D.F. Williams, Biomaterials 29, 2941 (2008).
28. V.S. Polikov, P.A. Tresco, W.M. Reichert, J. Neurosci. Methods 48 (148), 1 (2005).
29. L.S. Robblee, S.F. Cogan, U.M. Twardach, T.L. Rose, R.B. Jones, A.G. Kimball, Eleventh Quarterly Report, NIH-NINDS Contract No. NOl-NS-8-2313, (EIC Laboratories, Inc., Norwood, MA, 1991).
30. L.S. Robblee, T.L. Rose, Neural Prostheses-Fundamental Studies (Prentice Hall, NJ, 1990).
31. M. Schuettler, C. Henle, J.S. Ordonez, W. Meier, T. Guenther, T. Stieglitz, Proc. IEEE EMBC Annual International Conference (2008), pp. 3212-3215.
32. M. Schuettler, D. Pfau, J.S. Ordonez, C. Henle, P. Woias, T. Stieglitz, Proc. IEEE Engineering in Medicine and Biology Conference (2009), pp. 1612-1615.
33. M. Schuettler, S. Schroeer, J.S. Ordonez, T. Stieglitz, Proc. IEEE Neural Engineering Conference (2011), pp. 245-248.
34. M. Schuettler, S. Stiess, B.V. King, G.J. Suaning, J. Neural Eng. 2, 121 (2005).
35. G.J. Suaning, M. Schuettler, J.S. Ordonez, N.H. Lovell, Proc. IEEE Neural Engineering Conference (2007), pp. 5-8.
36. R.A. Green, J.S. Ordonez, M. Schuettler, L.A. Poole-Warren, N.H. Lovell, G.J. Suaning, J. Biomater. 31 (5), 886 (2009).
37. C. Henle, C. Hassler, F. Kohler, M. Schuettler, T. Stieglitz, Proc. Annual Conference of IEEE EMBS (2011), pp. 640-643.
38. C. Henle, A. Madjarow, M. Schuettler, T. Stieglitz, Biomed. Tech. 55, 229 (2010).
39. C. Henle, M. Raab, J.G. Cordeiro, S. Doostkam, A. Schulze-Bonhage, T. Stieglitz, J. Rickert, Biomed. Microdevices 13, 59 (2011).
40. C. Henle, M. Schuettler, J.S. Ordonez, T. Stieglitz, Proc. IEEE EMBC Annual International Conference (2008), pp. 4208-4211.
41. J.T. Mortimer, "Final Report to the NIH-NINDS" (N01-NS-6-2346, 2000), pp. 1-30.
42. D. Rodger, A.J. Fong, W. Li, Sens. Actuators, B 132, 449 (2008).
43. N. Lago, K. Yoshida, K.P. Koch, X. Navarro, IEEE Trans. Biomed. Eng. 54, 281 (2007).
44. B. Rubehn, C. Bosman, R. Oostenveld, P. Fries, T. Stieglitz, J. Neural Eng. 6 (3), 036003 (2009).
45. T. Stieglitz, Acta Neurochir. Suppl. 97, 411 (2007).
46. C. Henle, W. Meier, M. Schuettler, T. Boretius, T. Stieglitz, Proc. World Congress on Biomedical Engineering (2009), pp. 100-103.
47. G.G. Naples, J.T. Mortimer, A. Scheiner, J.D. Sweeney, IEEE Trans. Biomed. Eng. 35, 905 (1988).
48. T. Stieglitz, M. Schuettler, J.U. Meyer, Proc. 21st Annual International Conference of the IEEE Engineering in Medicine and Biology Society (1999), p. 487.
49. L. Kenney, G. Bultstra, R. Buschman, P. Taylor, G. Mann, J. Holsheimer, A. Nene, M. Tenniglo, H. van der Aa, J. Hobby, J. Artif. Organs 26, 267 (2002).
50. K.H. Polasek, H.A. Hoyen, M.W. Keith, D.J. Tyler, IEEE. Trans. Neural. Syst. Rehabil. Eng. 15, 76 (2007).
51. J. Delbeke, M.C. Wanet-Defalque, B. Gerard, M. Troosters, G. Michaux, J. Artif. Organs 26, 232 (2002).
52. C. Veraart, M.C. Wanet-Defalque, B. Gerard, A. Vanlierde, J. Delbeke, J. Artif. Organs 27, 996 (2003).
53. C. Veraart, C. Raftopoulos, J.T. Mortimer, J. Delbeke, D. Pins, G. Michaux, A. Vanlierde, S. Parrini, M.C. Wanet-Defalque, Brain Res. 813, 181 (1998).
54. J. Weiland, Engineering in Medicine and Biology Society, 2009. EMBC 2009. Annual International Conference of the IEEE (2009), pp. 4140-4143.
55. E.C. Leuthardt, G. Schalk, J.R. Wolpaw, J.G. Ojemann, D.W. Moran, J. Neural Eng. 1, 63 (2004).
56. J.F. Hetke, J.C. Williams, D.S. Pellinen, R.J. Vetter, D.R. Kipke, IEEE EMBS Conf. on Neural Engin. (2003), pp. 181-184.
57. P.K. Campbell, K.E. Jones, R.J. Huber, K.W. Horch, R.A. Normann, IEEE Trans. Biomed. Eng. 38, 758 (1991).
58. S. Kisban, S. Herwik, K. Seidl, B. Rubehn, M.A. Ulmilta, L. Fogassi, T. Stieglitz, O. Paul, P. Ruther, Proc. 29th Annual Int. Conf. on the IEEE Eng. in Medicine and Biology Soc. (2007), pp. 175-178.
59. N.H. Hosseini, R. Hoffmann, S. Kisban, T. Stieglitz, O. Paul, P. Ruther, Proc. 29th Annual Int. Conf. on the IEEE Eng. in Medicine and Biology Soc. (2007), pp. 4711-4714.
60. S. Kisban, Engineering in Medicine and Biology Society, EMBS 2008. 30th Annual International Conference of the IEEE (2008), pp. 2016-2019.
61. K. Warwick, M. Gasson, B. Hutt, I. Goodhew, P. Kyberd, B. Andrews, P. Teddy, A. Shad, Arch. Neurol. 60 (10), 1369 (2003).
62. L.R. Hochberg, M.D. Serruya, G.M. Friehs, J.A. Mukand, M. Saleh, A.H. Caplan, Nature 442, 164 (2006).
63. C.J. Love, Cardiac Pacemakers and Defi brillators (Vadecum, Europe, 2006).
64. S.F. Cogan, IEEE Trans. Biomed. Eng. 57, 2313 (2010).
65. M. Gierthmuehlen, T. Ball, X. Wang, C. Henle, M. Raab, T. Stieglitz, J. Kaminsky, J. Neurosci. Methods 202, 77 (2011).
66. T. Oh, O. Gilad, A. Ghosh, M. Schuettler, D.S. Holder, Med. Biol. Eng. Comput. 49, 593 (2011).
67. D. Tsai, J.W. Morley, G.J. Suaning, N.H. Lovell, J. Neurophysiol. 102 (5), 2982 (2009).
68. T. Stieglitz, M. Schuettler, B. Rubehn, International IEEE/EMBS Conference on Neural Engineering (NER) (2011), pp. 529-533.
69. J. Richardson, R.R. Miller, W.M. Reichert, Biomaterials 14, 627 (1993).
70. K.D. Wise, J.B. Angell, A. Starr, IEEE Trans. Biomed. Eng. 3, 238 (1970).
71. E. Maynard, C. Nordhausen, R. Normann, Electroencephalogr. Clin. Neurophysiol. 102, 228 (1997).
72. P.J. Rousche, R.A. Normann, J. Neurosci. Methods 82, 1 (1998).
73. T. Lefurge, E. Goodall, K. Horch, L. Stensaas, A. Schoenberg, Ann. Biomed. Eng. 19, 197 (1991).
74. A. Gilletti, J. Muthuswamy, J. Neural Eng. 3, 189 (2006).
75. J.E. Shelby, Introduction to Glass Science and Technology (Royal Society of Chemistry, Cambridge, UK, 2005).
76. G.B. Alexander, W.M. Heston, R.K. Iler, J. Phys. Chem. 58 (6), 453 (1954).
77. R. Sweitzer, J. Bioact. Compat. Polym. 21 (1), 5 (2006).
78. C. Gonzalez, M. Rodriguez, J. Neurosci. Methods 72, 189 (1997).
79. A.H. Ming-Wei, " Micromachined High-Density Electrodes for Retinal Prosthesis " (University of California, Los Angeles, 2003).
80. D.B. Shire, S.K. Kelly, J. Chen, P. Doyle, M.D. Gingerich, S.F. Cogan, W.A. Drohan, O. Mendoza, L. Theogarajan, J.L. Wyarr, J.H. Waler, J.-A.M. Mason, IEEE Trans. Biomed. Eng. 56, 2502 (2009).
81. X. Navarro, S. Calvet, F.J. Rodríguez, T. Stieglitz, C. Blau, M. Buti, E. Valderrama, J.U. Meyer, J. Peripher. Nerv. Syst. 3, 91 (1998).
82. F.J. Rodríguez, D. Ceballos, M. Schuettler, E. Valderrama, T. Stieglitz, X. Navarro, J. Neurosci. Met. 98, 105 (2000).
83. D. Ceballos, A. Valero, E. Valderrama, M. Schuettler, T. Stieglitz, X. Navarro, J. Biomed. Mater. Res. 60, 517 (2002).
84. X. Navarro, T.B. Krueger, N. Lago, S. Micera, T. Stieglitz, P. Dario, J. Periph. Nerv. Syst. 10, 229 (2005).
85. D. Farina, K. Yoshida, T. Stieglitz, K.P. Koch, J. Appl. Physiol. 104, 821 (2008).
86. J. Badia, T. Boretius, E. Udina, T. Stieglitz, X. Navarro, IEEE Trans. Biomed. Eng. 58, 2324 (2011).
87. K. Malay, K.L. Mittal, Polyimides: Fundamentals and Applications, 1st ed. (Marcel Dekker, New York, 1996).
88. H. Ohya, V.V. Kudryavtsev, S.I. Semenova, Polyimide Membranes: Applications, Fabrications, and Properties (Gordon and Breach, Amsterdam, The Netherlands, 1996).
89. L.K. Massey, Permeability Properties of Plastics and Elastomers: A Guide to Packaging and Barrier Materials, 2nd ed. (William Andrew Publishing, NY, 2003);
90. M. Ree, H. Han, C.C. Gryte, J. Appl. Polym. Sci. 33, 505 (1995).
91. R. Buchhold, A. Nakladal, G. Gerlach, K. Sahre, K.-J. Eichhorn, Thin Solid Films 312, 232 (1998).
92. R. Buchhold, A. Nakladal, G. Gerlach, K. Sahre, MRS Proc. 511, 359 (1998).
93. B. Rubehn, T. Stieglitz, Biomaterials 31, 3449 (2010).
94. R. DeIasi, J. Russell, J. Appl. Polym. Sci. 15, 2965 (1971).
95. R. DeIasi, J. Appl. Polym. Sci. 16 (11), 2909 (1972).
96. F.J. Campbell, A.K. Brewer, R.J. Orr, T.A. Janicke, A.M. Bruning, Conference on Electrical Insulation and Dielectric Phenomena (1988), pp. 180-188.
97. G.E. Loeb, R.A. Peck, J. Neurosci. Methods 64 (1), 95 (1996).
98. J.F. Hetke, J.L. Lund, K. Najafi, K.D. Wise, D.J. Anderson, IEEE Trans. Biomed. Eng. 41 (4), 314 (1994).
99. J. Huang, R.J. Cranford, T. Matsuura, C. Roy, J. Appl. Polym. Sci., 87, 2306 (2003).
100. T.P. Russel, H. Gugger, J.D. Swalen, Polym. Sci. Ser. A Polym. Phys. 21, 1745 (1983).
101. E. Gattiglia, T.P. Russel, Polym. Sci. Ser. A Polym. Phys. 27, 2131 (1989).
102. T. Stieglitz, H. Beutel, J.U. Meyer, Sens. Actuators, A 60, 240 (1997).
103. T. Stieglitz, Int. J. Micro-Nano Scale Transport 1 (2), 139 (2010).
104. B. Rubehn, S.B.E. Wolff, P. Tovote, M. Schuettler, A. Lüthi, T. Stieglitz, 33rd IEEE EMBS Conference (2011).
105. H.K. Yasuda, Plasma Processes Polym. 2 (4), 293 (2005).
106. S. Murray, C. Hillman, J. Electron. Packag. 126, 390 (2004).
107. K. Mittal, Electrocomponent Sci. Technol. 3, 21 (1976).
108. J. Comyn, Adhesion Science (Royal Society of Chemistry, Cambridge, UK, 1997).
109. L.W. Bruch, M.W. Cole, E. Zaremba, Physical Adsorption: Forces and Phenomena (Dover Publications, NY, 2007).
110. K.L. Mittal, Adhesion Measurement of Films and Coatings (VSP, The Netherlands, 2001), p. 456.
111. M. Ohring, Materials Science of Thin Films, 2nd ed. (Academic Press, NY, 2011).
112. T. Boretius, T. Jurzinsky, C. Koehler, S. Kerzenmacher, H. Hillebrecht, T. Stieglitz, 33rd Annual International Conference of the IEEE EMBS (2011).
113. M. Schuettler, T. Stieglitz, 7th Ann. Conf. of the IFESS (2002), pp. 228-230.
114. S.F. Cogan, D.J. Edell, A.A. Guzelian, Y. Ping Liu, R. Edell, J. Biomed. Mater. Res. Part A 67 (3), 856 (2003).
115. R. Green, N. Lovell, G. Wallace, Biomaterials 29, 3393 (2008).
116. R.A. Green, F. Devillaine, C. Dodds, P. Matteucci, S. Chen, P. Byrnes-Preston, L.A. Poole-Warren, N.H. Lovell, G.J. Suaning, Engineering in Medicine and Biology Society (EMBC) 6769 (2010).
117. J.S. Ordonez, C. Boehler, M. Schuettler, T. Stieglitz, Proc. IEEE EMBC (2012).
118. R.L. White, L.A. Roberts, N.E. Cotter, Ann. N.Y. Acad. Sci. 405, 183 (1983).
119. D.P. Woodruff, The Chemical Physics of Solid Surfaces (Elsevier, NY, 2002).
120. Y. Gnanou, M. Fontanille, Chemistry of Polymers (Wiley, NJ, 2008).
121. E. Sacher, J.R. Susko, J. Appl. Polym. Sci. 23, 2355 (1979).
122. E. Sacher, J.R. Susko, J. Appl. Polym. Sci. 26, 679 (1981).
123. C. Girardeaux, E. Druet, P. Demoncy, M. Delamar, J. Electron. Spectrosc. Relat. Phenom. 74, 57 (1995).
124. F.D. Egitto, L.J. Matienzo, K.J. Blackwell, A.R. Knoll, J. Adhes. Sci. Technol. 8 (4), 411 (1994).
125. C. Girardeaux, E. Druet, P. Demoncy, M. Delamar, J. Electron. Spectrosc. Relat. Phenom. 70, 11 (1994).
126. D.J. Ham, J.S. Lee, Energies 2, 873 (2009).
127. G.L. Harris, Properties of Silicon Carbide (INSPEC, The Institution of Electrical Engineers, 1995).
128. B.K. Furman, K.D. Childs, H. Clearfi eld, R. Davis, S. Purushothaman, J. Vac. Sci. Technol., A 10 (4), 2913 (1992).
129. T.C. Chou, J. Mater. Sci. 26, 1412 (1991).
130. J. Ordonez, C. Boehler, M. Schuettler, T. Stieglitz, 33rd International IEEE EMBS Conference (2011).
131. J.S. Ordonez, C. Boehler, M. Schuettler, T. Stieglitz, e-Proc. MRS Spring Conference (2012).
132. C. Hassler, R.P. von Metzen, J. Biomed. Mater. Res. Part B 93, 266 (2010).
133. J.H.-C Chang, B. Lu, Y.-C. Tai, Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS) (2011), pp. 390-393.
134. M. Schuettler, M. Gross, A. Staiger, F. Katzenberg, T. Stieglitz, Proc. of the 23rd Ann. Internat. Conf. of the IEEE EMBS 1, 769 (2001).
135. M. Schuettler, A. Vanhoestenberghe, N. Saeidi, X. Liu, J. Evans, C. Colinge, A. Demosthenous, N. Donaldson, 33rd Annual International Conference of the IEEE EMBS (2011), pp. 2965-2968.