Preparation and characterization of PZT thick film enhanced by zno nanowhiskers for MEMS piezoelectric generators

Progress in Natural Science: Materials International

Volumn 21, Issue 2, 2011, Pages 159-163

  Duan, Zhong Xia ^a   Yu, Guo Qin ^b   Liu, Jun Biao ^a   Liu, Jun ^b   Dong, Xiao Wen ^b   Han, Li ^a   Jin, Peng Yun ^a  

^a INSTITUTE OF ELECTRICAL ENGINEERING   (China)

^b Shanghai Electric Power Company   (China)

Author keywords

Electrical properties; Nanowhisker; Piezoelectric generator; PZT thick film; ZnO

Indexed keywords

COMPOSITE FILMS; FERROELECTRIC FILMS; FILM PREPARATION; II-VI SEMICONDUCTORS; LEAD COMPOUNDS; PEROVSKITE; PIEZOELECTRICITY; SILICON COMPOUNDS; SOL-GEL PROCESS; SOL-GELS; THICK FILMS;

COMPOSITE THICK FILMS; FILM-THICKNESS; HYBRID SOL-GEL; PIEZOELECTRIC COMPOSITE; PIEZOELECTRIC GENERATORS; PZT; PZT THICK FILMS; SI SUBSTRATES; SOL-GEL ROUTES; ZNO NANOWHISKERS;

ZINC OXIDE;

EID: 84861960376     PISSN: 10020071     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1002-0071(12)60050-1     Document Type: Article

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