Miniature active damping stage for scanning probe applications in ultra high vacuum

Review of Scientific Instruments

Volumn 83, Issue 3, 2012, Pages

  Assig, Maximilian ^a   Koch, Andreas ^a   Stiepany, Wolfgang ^a   Straer, Carola ^a   Ast, Alexandra ^b   Kern, Klaus ^a,c   Ast, Christian R ^a  

^a MAX PLANCK INSTITUT FÜR FESTKÖRPERFORSCHUNG   (Germany)

^b UNIVERSITY OF STUTTGART   (Germany)

^c EPFL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVE DAMPING; EXPERIMENTAL SETUP; EXTERNAL INFLUENCES; GOUGH-STEWART PLATFORM; LOW VIBRATION; MEASURED SIGNALS; REFERENCE POINTS; SCANNING PROBE MICROSCOPE; SCANNING PROBES; SI (1 1 1); SIX-DEGREE OF FREEDOMS; TOPOGRAPHIC IMAGES; WORKING PRINCIPLES;

SCANNING TUNNELING MICROSCOPY;

DAMPING;

EID: 84861636772     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3689769     Document Type: Review

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