Development of high temperature SiC based hydrogen/hydrocarbon sensors with bond pads for packaging

Materials Science Forum

Volumn 717-720, Issue , 2012, Pages 1191-1194

  Xu, Jennifer C ^a   Hunter, Gary W ^a   Chen, Liangyu ^a   Biaggi Labiosa, Azlin M ^a   Ward, Benjamin J ^b   Lukco, Dorothy ^a   Gonzalez III, Jose M ^a   Lampard, Peter S ^a   Artale, Michael A ^a   Hampton, Christopher L ^a  

^a NASA GLENN RESEARCH CENTER   (United States)

^b Makel Engineering Inc   (United States)

Author keywords

High temperature; Hydrogen hydrocarbon sensors; Schottky diodes; SiC

Indexed keywords

SCHOTTKY BARRIER DIODES;

HIGH TEMPERATURE; HYDROGEN/HYDROCARBON SENSORS; SCHOTTKY DIODES; SENSOR ELEMENTS; SENSOR MODIFICATION; SENSOR STRUCTURES; TECHNICAL CHALLENGES; TESTING SYSTEMS;

SILICON CARBIDE;

EID: 84861409524     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/MSF.717-720.1191     Document Type: Conference Paper

References (3)

1. G.W. Hunter, J. C. Xu, and D. Lukco, US Patent 7,389,675B1 (2008).
2. G. W. Hunter, J. C. Xu, L. K. Dungan, B. J. Ward, S. Rowe, J. Williams, D. B. Makel, C.C. Liu, and C. W. Chang, Smart sensor systems for aerospace applications: from sensor development to application. ECS Trans., 16 (11), 333-344 (2008).
3. B. J. Ward, K. Wilcher, and G. W. Hunter, Gas microsensor array development targeting enhanced engine emissions testing. AIAA Infotech@Aerospace 2010 (Atlanta, GA, 20-22 April 2010), AIAA 2010-3327.