The effect of dopants on the sensing selectivity of SnO 2 thin films-based gas sensors

IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE

Volumn , Issue , 2002, Pages 455-457

  Shamsudin, Shafariza ^a   Yahaya, Muhamad ^a   Salleh, Muhamad Mat ^a  

^a UNIVERSITI KEBANGSAAN MALAYSIA   (Malaysia)

Author keywords

[No Author keywords available]

Indexed keywords

DOPING MATERIALS; EFFECT OF DOPANTS; ELECTRON BEAM EVAPORATION; METAL OXIDE GAS SENSORS; SELECTIVITY AND SENSITIVITY; TIO; ZNO;

ACETONE; BENZENE; CHEMICAL SENSORS; ELECTRON BEAMS; OPTIMIZATION; PLATINUM; THIN FILMS; TITANIUM DIOXIDE; VAPORS; ZINC OXIDE;

SEMICONDUCTOR DOPING;

EID: 84861189406     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)

1. Gong Zhang, Meilin Liu, Effect of particle size and dopant on properties of SnO2-based gas sensors, Sensors and Actuators B 69: 144-152, (2000).
2. Ji Haeng Yu, Gyeong Man Choi, Selective CO gas detection of CuO- and ZnO- doped SnO2 gas sensor. Sensors and Actuator B 75: 56-61,(2001).
3. 2 thin films. Sensors and Actuator B: 219-221, (2000).
4. Dae-Sik Lee, Jong-Kyong Jung, Jun-Woo Lim, Jeung-Soo Huh, Duk-Dong Lee, Recognition of volatile organic compounds using SnO2 sensor array and pattern recognition analysis. Sensors and Actuators B7:228-236 (2001).