Metrology and characterization challenges for emerging research materials and devices

AIP Conference Proceedings

Volumn 1395, Issue , 2011, Pages 43-46

  Garner, C Michael ^a   Herr, Dan ^b   Obeng, Yaw ^c  

^a INTEL CORPORATION   (United States)

^b SEMICONDUCTOR RESEARCH CORPORATION   (United States)

^c NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84861074090     PISSN: 0094243X     EISSN: 15517616     Source Type: Conference Proceeding    
DOI: 10.1063/1.3657864     Document Type: Conference Paper

References (1)

1. Semiconductor Industry Association. The International Technology Roadmap for Semiconductors, 2009 Edition. International SEMATECH: Austin, TX, 2009.