Deflection and resonance frequency shift of a microcantilever induced by chemisorption: Oxygen on Si(100)

Advanced Materials Research

Volumn 503-504, Issue , 2012, Pages 455-458

  Zhang, Jiqiao ^a   Huang, Ganyun ^b   Feng, Xiqiao ^c   Yu, Shouwen ^c  

^a GUANGDONG UNIVERSITY OF TECHNOLOGY   (China)

^b TIANJIN UNIVERSITY   (China)

^c TSINGHUA UNIVERSITY   (China)

Author keywords

Chemisorption; Deflection; Microcantilever; Resonance frequency; Surface elasticity

Indexed keywords

BOND INTERACTIONS; ENERGY-BASED MODELS; MECHANICAL BEHAVIOR; MICRO-CANTILEVERS; MOLECULAR LEVEL INTERACTIONS; RESONANCE FREQUENCIES; RESONANCE FREQUENCY SHIFT; SI(1 0 0); SI(100) SURFACE; STATIC DEFLECTIONS; SURFACE ELASTICITIES;

COMPOSITE MICROMECHANICS; DEFLECTION (STRUCTURES); ELASTICITY; FREQUENCY SHIFT KEYING; MANUFACTURE; NANOCANTILEVERS; NATURAL FREQUENCIES; OXYGEN; SILICON;

CHEMISORPTION;

EID: 84860771991     PISSN: 10226680     EISSN: None     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/AMR.503-504.455     Document Type: Conference Paper

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