A capacitance-to-digital converter for displacement sensing with 17b resolution and 20μs conversion time

Digest of Technical Papers - IEEE International Solid-State Circuits Conference

Volumn 55, Issue , 2012, Pages 198-199

  Xia, Sha ^a   Makinwa, Kofi ^a   Nihtianov, Stoyan ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE-TO-DIGITAL CONVERTER; CAPACITIVE DISPLACEMENT SENSORS; CONVERSION TIME; DISPLACEMENT SENSING; DISPLACEMENT SENSOR; ELECTRODE SPACING; MEASUREMENT ACCURACY; MECHANICAL COMPONENTS; MECHANICAL TOLERANCES; MECHATRONIC SYSTEMS; OPTICAL INTERFEROMETER; SERVO LOOPS; SYSTEM CALIBRATION; WAFER STEPPER;

CAPACITANCE; FITS AND TOLERANCES;

FREQUENCY CONVERTERS;

EID: 84860675969     PISSN: 01936530     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ISSCC.2012.6176973     Document Type: Conference Paper

References (6)

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