A ΔΣ interface for MEMS accelerometers using electrostatic spring-constant modulation for cancellation of bondwire capacitance drift

Digest of Technical Papers - IEEE International Solid-State Circuits Conference

Volumn 55, Issue , 2012, Pages 196-197

  Lajevardi, Pedram ^a   Petkov, Vladimir ^b   Murmann, Boris ^a  

^a STANFORD UNIVERSITY   (United States)

^b Robert Bosch   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AUTOMOTIVE APPLICATIONS; BONDWIRE; MECHANICAL STRESS; MEMS ACCELEROMETER; OFFSET DRIFT; PARASITIC CAPACITANCE;

NAVIGATION SYSTEMS; STRESSES;

ACCELEROMETERS;

EID: 84860650203     PISSN: 01936530     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ISSCC.2012.6176972     Document Type: Conference Paper

References (6)

1. "SCA830-D05 Single Axis Accelerometer with Digital SPI Interface," VTI Technologies, Finland, 2006.
2. J. Marek, "MEMS for Automotive and Consumer Electronics," ISSCC Dig. Tech. Papers, pp. 9-17, 2010.
3. T. Smith, O. Nys, M. Chevroulet, Y. DeCoulon, and M. Degrauwe, "A 15 b Electromechanical Sigma-Delta Converter for Acceleration Measurements, "ISSCC Dig. Tech. Papers, pp. 160-161, 1994.
4. M. Lemkin and B.E. Boser, "A Three-Axis Micromachined Accelerometer with a CMOS Position-Sense Interface and Digital Offset-Trim Electronics," IEEE J. Solid-State Circuits, vol. 34, pp. 456-468, Apr. 1999.
5. V. P. Petkov and B.E. Boser, "A Fourth-Order ΣΔ Interface for Micromachined Inertial Sensors," IEEE J. of Solid-State Circuits, vol. 40, pp. 1602-1609, Aug. 2005.
6. M. Yucetas, J. Salomaa, A. Kalanti, L. Aaltonen, and K. Halonen, "A Closed-Loop SC Interface for a ±1.4g Accelerometer with 0.33% Nonlinearity and 2μg/vHz Input Noise Density," ISSCC Dig. Tech. Papers, pp. 320-321, 2010.