Mechanical and electronic amplitude-limiting techniques in a MEMS resonant accelerometer

IEEE Sensors Journal

Volumn 12, Issue 6, 2012, Pages 1719-1725

  Tocchio, Alessandro ^a   Caspani, Alessandro ^a   Langfelder, Giacomo ^a  

^a POLITECNICO DI MILANO   (Italy)

Author keywords

Accelerometer; mechanical nonlinearities; MEMS resonator; transimpedance amplifier

Indexed keywords

CLAMPED-CLAMPED BEAM; LARGE DISPLACEMENTS; LIMITING STAGE; MECHANICAL NONLINEARITIES; MEMS RESONANT ACCELEROMETERS; MEMS RESONATORS; MEMS SENSORS; OSCILLATING AMPLITUDES; OSCILLATING CIRCUITS; OSCILLATION AMPLITUDE; PARASITIC CAPACITANCE; RESONANT ACCELEROMETER; SENSING ELEMENTS; TRANSIMPEDANCE; TRANSIMPEDANCE AMPLIFIERS;

ACCELEROMETERS; DIFFERENTIAL AMPLIFIERS; MICROELECTROMECHANICAL DEVICES; MICROMECHANICAL RESONATORS;

OSCILLATORS (ELECTRONIC);

EID: 84860537894     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2011.2177657     Document Type: Article

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