Differential pressure sensor using a piezoresistive cantilever

Journal of Micromechanics and Microengineering

Volumn 22, Issue 5, 2012, Pages

  Takahashi, Hidetoshi ^a   Dung, Nguyen Minh ^a   Matsumoto, Kiyoshi ^a   Shimoyama, Isao ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFERENTIAL PRESSURE SENSOR; DIFFERENTIAL PRESSURES; FREE EDGE; MEASURED RESULTS; PIEZO-RESISTIVE CANTILEVERS;

SENSORS;

NANOCANTILEVERS;

EID: 84860484219     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/22/5/055015     Document Type: Article

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