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Volumn , Issue , 2012, Pages 1293-1296
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Wafer-level integrated electrospray emitters for a pumpless microthruster system operating in high efficiency ion-mode
a
EPFL
(Switzerland)
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Author keywords
[No Author keywords available]
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Indexed keywords
BIPOLAR EXCITATION;
CAPILLARY FORCE;
ELECTROSPRAY EMITTER;
ELECTROSPRAYS;
EXTRACTOR ELECTRODES;
HIGH YIELD;
INNER DIAMETERS;
LIQUID DELIVERY;
MICROTHRUSTER;
POLYMER BASED;
PUMP SYSTEM;
PUMPLESS;
WAFER BONDING PROCESS;
WAFER LEVEL;
WAFER-LEVEL INTEGRATION;
CAPILLARITY;
EXCITED STATES;
INTEGRATION;
WAFER BONDING;
MEMS;
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EID: 84860444287
PISSN: 10846999
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1109/MEMSYS.2012.6170394 Document Type: Conference Paper |
Times cited : (2)
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References (2)
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