Monolithic SU-8 based hollow waveguide with integrated electro thermally tunable iris filter for W-band applications

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2012, Pages 713-716

  Kohlstedt, A ^a   Dassinger, F ^a   Schlaak, F ^a   Fritzsch, C ^a   Jakoby, R ^a  

^a DARMSTADT UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRO-THERMAL ACTUATORS; HIGH ASPECT RATIO; HOLLOW WAVEGUIDES; IRIS FILTER;

ASPECT RATIO; MEMS; OPTICAL SYSTEMS; POLYCHLORINATED BIPHENYLS; THICK FILMS; WAVEGUIDE COMPONENTS;

WAVEGUIDE FILTERS;

EID: 84860424867     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2012.6170286     Document Type: Conference Paper

References (8)

1. Sammoura, Firas, Y.-C. Su, Y. Cai, C.-Y. Chi, B. Elamaran, E. Lin et al., "Plastic 95-GHz rectangular waveguides by micro molding technologies", Sensors and Actuators A: Physical, vol. 127, pp. 270-275, 2006.
2. C.E. Collins, R.E. Miles, J.W. Digby, G.M. Parkhurst, R.D. Pollard, J.M. Chamberlain et al., "A new micro-machined millimeter-wave and terahertz snap-together rectangular waveguide technology", Microwave and Guided Wave Letters, IEEE, vol. 9, pp. 63-65, 1999.
3. A. Kohlstedt, H.F. Schlaak, "Tiefenlithographieprozess für SU-8- Dickschicht-Funktionsstrukturen auf FR4-Leiterplattenmaterial", in GMM-Workshop: Technologien und Werkstoffe der Mikrosystem- und Nanotechnik. Darmstadt, Deutschland: 10./11.05.2010.
4. A. Kohlstedt, M. Staab, H.F. Schlaak, "Langzeituntersuchungen zur Eignung von SU-8 als Konstruktionswerkstoff", in VDE: Mikrosystemtechnik Kongress 2009, Berlin, Deutschland, 12.-14.Oktober, 2009.
5. D. Eicher, H.F. Schlaak, "Elektrothermische Aktoren aus SU-8 für den Einsatz in miniaturisierten Schrittantrieben" in Mikrosystemtechnik Kongress 2007, Dresden, Deutschland, 15.-17. Oktober, 2007.
6. M. Staab, H.F. Schlaak, "Novel Electrothermally Actuated Magnetostatic Bistable Microrelay for Telecommunication Applications", in Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24rd International Conference, Cancun, Mexiko, Jan 23-27, 2011.
7. A. Kohlstedt, H.F. Schlaak, "Design for Micromechanically Tuneable Microwave Hollow Waveguide Devices", in Actuator 2010, Bremen, Deutschland, June 14-16, 2010.
8. F. Arndt, Mode-Matching Methods. Encyclopedia of RF and Microwave Engineering, Wiley, 2005.