An optical microsystem for displays

Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop

Volumn , Issue , 2006, Pages 15-18

  Winkler, Bret ^a   Elkins, Dennis ^a   Tanner, Allen ^a   Ramsey, Victor ^b   Cuff, Randy ^b   Spangler, Leland Chip ^b  

^a Evans and Sutherland Computer Corporation   (United States)

^b Aspen Technologies Colorado   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; FLIP CHIP DEVICES; MICROSYSTEMS; SHOTCRETING; SURFACE MICROMACHINING;

CERAMIC PACKAGE; DEVICE FABRICATIONS; DRY PROCESS; OPTICAL MICROSYSTEMS; PIXEL COUNT; PROJECTION DISPLAYS; SURFACE MICROMACHINED MEMS; SYSTEM APPLICATIONS;

SOLID-STATE SENSORS;

EID: 84860360893     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)

1. Evans & Sutherland Digistar3 laser projector product line (http://www.es.com/products/digital_theater/)
2. Mignardi, M. A., et al., “The DMD-An Micro Optical Electromechanical Device for Display Applications,” in MEMS and MOEMS Technology and Applications, P. Rai-Choudhry, Ed., Bellingham, WA: SPIE Press, 2000, pp.70-208.
3. Petersen, K. E. “Silicon as a Mechanical Material”, Proc. IEEE, Vol. 70, No. 5, May 1982, pg 447.
4. Amm, D.T., Corrigan, R.W., “Grating Light Valve Technology: Update and Novel Applications,” Proc. Society of Information Display Symposium, Anaheim, CA, May 19, 1998.
5. Solgaard, O., Sandejas, F.S.A., and Bloom, D.M., “Deformable Grating Optical Modulator,” Optics Let., No.17, pp 688-691, May, 1992.
6. Trisnadi, J. I., Carlisle, C.B., and Monteverde, R., “Overview and Applications of Grating Light Valve Based Optical Write Engines for High-Speed Digital Imaging,” Proc. Micromachining and Microfabrication Symp., Photonics West 2004, San Jose, CA, Jan. 26, 2004.