The integration of high-k dielectric on two-dimensional crystals by atomic layer deposition

Applied Physics Letters

Volumn 100, Issue 15, 2012, Pages

  Liu, Han ^a   Xu, Kun ^a   Zhang, Xujie ^a   Ye, Peide D ^a  

^a PURDUE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

2-D CRYSTALS; ALD GROWTH; CRYSTAL SURFACES; EXPERIMENTAL STUDIES; HIGH-K DIELECTRIC; MOLYBDENUM DISULFIDE; PHYSICAL ADSORPTION; PRECURSOR ADSORPTION; TRIMETHYLALUMINUM; TWO-DIMENSIONAL (2D) CRYSTALS; TWO-DIMENSIONAL CRYSTALS;

ADSORPTION; ATOMIC LAYER DEPOSITION; MOLYBDENUM; MOLYBDENUM COMPOUNDS;

TWO DIMENSIONAL;

EID: 84859800724     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3703595     Document Type: Article

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