Exploring the potential of MEMS gyroscopes: Successfully using sensors in typical industrial motion control applications

IEEE Industrial Electronics Magazine

Volumn 6, Issue 1, 2012, Pages 14-24

  Antonello, Riccardo ^a   Oboe, Roberto ^a  

^a UNIVERSITY OF PADOVA   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

BATCH FABRICATION; CONTROL APPLICATIONS; LOW POWER; MACRO SCALE; MEMS GYROSCOPE; MEMS SENSORS; MEMS TECHNOLOGY; MICRO-SCALES; MICROMIRROR ARRAY; NEW DEVICES; POWER REQUIREMENT; REDUCED COST; VIDEO PROJECTORS;

COMPETITION; ELECTROMECHANICAL DEVICES; FABRICATION; MEMS;

SENSORS;

EID: 84859741790     PISSN: 19324529     EISSN: None     Source Type: Journal    
DOI: 10.1109/MIE.2012.2182832     Document Type: Article

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