Thermo-mechanical properties of a deformable mirror with screen printed actuator

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 8253, Issue , 2012, Pages

  Bruchmann, C ^a,b   Appelfelder, M ^a   Beckert, E ^b   Eberhardt, R ^b   Tunnermann A ^a,b  

^a FRIEDRICH SCHILLER UNIVERSITY JENA   (Germany)

^b FRAUNHOFER INSTITUTE FOR APPLIED OPTICS AND PRECISION ENGINEERING   (Germany)

Author keywords

Compound loading; Deformable mirror; Homogeneous loading; Laser induced deformation; Thermally induced deformation; Unimorph

Indexed keywords

A-CERAMICS; COPPER LAYER; DEFORMABLE MIRRORS; FRONT SURFACES; LASER POWER; LTCC SUBSTRATES; MIRROR ASSEMBLY; MIRROR DESIGN; MULTI-PHYSICS; OPTIMIZED DESIGNS; PZT LAYER; REAR SURFACES; SCREEN-PRINTED; THERMAL LOADINGS; THERMOMECHANICAL MODEL; THERMOMECHANICAL MODELING; THERMOMECHANICAL PROPERTIES; UNIMORPH;

DEFORMATION; DESIGN; LOADING; MECHANICAL ACTUATORS; MECHANICAL PROPERTIES; MEMS;

MIRRORS;

EID: 84859600869     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.912614     Document Type: Conference Paper

References (6)

1. E. M. Ellis, [Low-cost Bimorph Mirrors in Adaptive Optics], PhD Imperial College of Science, Technology and Medicine, University of London, (1999).
2. S. Verpoort and U. Wittrock, "Unimorph deformable mirror for telescopes and laser applications in space, " Proc. Int. Conf. Space Optics, Rhodes, Greece (2010).
3. C. Schwartz, E. Ribak, and S. G. Lipson, "Bimorph adaptive mirrors and curvature sensing, " J. Opt. Soc. Am. A 11, 895-902 (1994).
4. J. C. Dainty, A. V. Koryabin, and A. V. Kudryashov, "Low-Order Adaptive Deformable Mirror, " Appl. Opt. 37, 4663-4668 (1998). (Pubitemid 128659722)
5. Y. Ning, H. Zhou, H. Yu, C. Rao, and W. Jiang, "Thermal stability test and analysis of a 20-actuator bimorph deformable mirror, " Chin. Phys. B 18, 1089-1095 (2009).
6. S. Verpoort, [Entwicklung neuartiger deformierbarer Spiegel für den Einsatz in Hochleistungslasern], PhD Universität Duisburg-Essen, (2011).