The emergence of multifrequency force microscopy

Nature Nanotechnology

Volumn 7, Issue 4, 2012, Pages 217-226

  Garcia, Ricardo ^a   Herruzo, Elena T ^a  

^a INSTITUTO DE MICROELECTRÓNICA DE MADRID   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; NANOCANTILEVERS;

ACQUISITION TIME; DYNAMIC FORCE MICROSCOPY; EXCITATION FREQUENCY; FORCE MICROSCOPY; ITS APPLICATIONS; SPATIAL RESOLUTION; SPECIFIC FREQUENCIES; SUB-SURFACE IMAGING;

DEFLECTION (STRUCTURES);

NANOMATERIAL;

ATOMIC FORCE MICROSCOPY; ELECTRIC POTENTIAL; ELECTRON MICROSCOPY; EXCITATION; FREQUENCY ANALYSIS; MEASUREMENT; MOLECULAR IMAGING; MOLECULAR INTERACTION; MULTIFREQUENCY FORCE MICROSCOPY; PRIORITY JOURNAL; PROTEIN ANALYSIS; PROTEIN STRUCTURE; REVIEW; SURFACE PROPERTY;

EID: 84859578492     PISSN: 17483387     EISSN: 17483395     Source Type: Journal    
DOI: 10.1038/nnano.2012.38     Document Type: Review

References (107)

1. Binnig, G., Quate, C. F. & Gerber, C. Atomic force microscope. Phys. Rev. Lett. 56, 930-933 (1986).
2. Meyer, G. & Amer, N. M. Novel optical approach to atomic force microscopy. Appl. Phys. Lett. 53, 1045-1047 (1988).
3. Garcia, R. & Perez, R. Dynamic atomic force microscopy methods. Surf. Sci. Rep. 47, 197-301 (2002).
4. Giessibl, F. J. Advances in atomic force microscopy. Rev. Mod. Phys. 75, 949-983 (2003).
5. Parot, P. et al. Past, present and future of atomic force microscopy in life sciences and medicine. J. Mol. Recognit. 20, 418-431 (2007).
6. Garcia, R., Magerle, R. & Perez, R. Nanoscale compositional mapping with gentle forces. Nature Mater. 6, 405-411 (2007).
7. Ando, T., Uchihashi, T. & Fukuma, T. High-speed atomic force microscopy for nano-visualization of dynamic biomolecular processes. Prog. Surf. Sci. 83, 337-437 (2008).
8. Gan, Y. Atomic and subnanometer resolution in ambient conditions by atomic force microscopy. Surf. Sci. Rep. 64, 99-121 (2009).
9. Klinov, D. & Magonov, S. True molecular resolution in tapping-mode atomic force microscopy with high-resolution probes. Appl. Phys. Lett. 84, 2697-2699 (2004).
10. Fukuma, T., Kobayashi, K., Matsushige, K. & Yamada, H. True atomic resolution in liquid by frequency-modulation atomic force microscopy. Appl. Phys. Lett. 87, 034101 (2005).
11. Yamada, H. et al. Molecular resolution imaging of protein molecules in liquid using frequency modulation atomic force microscopy. Appl. Phys. Lett. 2, 095007 (2009).
12. Higgings, M. J., Sader, J. E. & Jarvis, S. P. Frequency modulation atomic force microscopy reveals individual intermediates with each unfolded I27 titin domain. Biophys. J. 90, 640-647 (2006).
13. Kuna, J. J. et al. The effect of nanometre-scale structure on interfacial energy. Nature Mater. 8, 837-842 (2009).
14. Baykara, M. Z., Schwendemann, T. C., Altman, E. I. & Schwarz, U. D. Three-dimensional atomic force microscopy: taking surface imaging to the next level. Adv. Mater. 22, 2838-2853 (2010).
15. Palermo, V., Palma, M. & Samori, P. Electronic characterization of organic thin films by Kelvin probe force microscopy. Adv. Mater. 18, 145-164 (2006).
16. Schwarz, A. & Wiesendanger, W. Magnetic sensitive force microscopy. Nano Today 3, 28-39 (2008).
17. Luan, B. & Robbins, M. O. Contact of single asperities with varying adhesion: comparing continuum mechanics to atomistic simulations. Phys. Rev. E 74, 026111 (2006).
18. Raman, A., Melcher, J. & Tung, R. Cantilever dynamics in atomic force microscopy. Nano Today 3, 20-27 (2008).
19. Stark, R. W. Bistability, higher harmonics and chaos in AFM. Mater. Today 13, 24-32 (September 2010).
20. Butt, H. J., Capella, B. & Kappl, M. Force measurements with the atomic force microscope: technique, interpretation and applications. Surf. Sci. Rep. 59, 1-152 (2005).
21. Bizarri, A. R. & Cannistraro, S. The application of atomic force spectroscopy to the study of biological complexes undergoing a biorecognition process. Chem. Soc. Rev. 39, 734-749 (2010).
22. Cross, S. E., Jin, Y-S., Rao, J. & Gimzewski, J. K. Nanomechanical analysis of cells from cancer patients. Nature Nanotech. 2, 780-783 (2007).
23. Goetz, J. G. et al. Biomechanical remodeling of the microenvironment by stromal caveolin-1 favors tumor invasion and metastasis. Cell 146, 148-163 (2011).
24. Arlett, J. L., Myers, E. B. & Roukes, M. L. Comparative advantages of mechanical biosensors. Nature Nanotech. 6, 203-215 (2011).
25. Gil-Santos, E. et al. Nanomechanical mass sensing and stiffness spectrometry based on two-dimensional vibrations of resonant nanowires. Nature Nanotech. 5, 641-645 (2010).
26. Garcia, R. Amplitude Modulation Atomic Force Microscopy (Wiley, 2010).
27. Butt, H. J. & Jascke, M. Calculation of thermal noise in atomic force microscopy. Nanotechnology 6, 1-7 (1995). This paper calculates the thermal noise of the cantilever by including the contributions from all the cantilever eigenmodes.
28. Rabe, U., Turner, I. & Arnold, W. Analysis of the high-frequency response of atomic force microscope levers. Appl. Phys. A 66, S277-S282 (1998).
29. Sader, J. E. Frequency response of cantilever beams immersed in viscous fluids with applications to the atomic force microscope. J. Appl. Phys. 84, 64-76 (1998).
30. Dürig, U. Relations between interaction force and frequency shift in large-amplitude dynamic force microscopy. Appl. Phys. Lett. 75, 433-435 (1999).
31. Tamayo, J. Energy dissipation in tapping-mode scanning force microscopy with low quality factors. Appl. Phys. Lett. 75, 3569-3571 (1999).
32. Stark, R. W. & Heckel, W. M. Fourier transformed atomic force microscopy: tapping mode atomic force microscopy beyond the Hookian approximation. Surf. Sci. 457, 219-228 (2000).
33. Rodriguez, T. R. & Garcia, R. Tip motion in amplitude modulation (tapping-mode) atomic-force microscopy: comparison between continuous and point-mass models. Appl. Phys. Lett. 80, 1646-1648 (2002).
34. Rabe, U., Janser, K. & Arnold, W. Vibrations of free and surface-coupled atomic force microscope cantilevers: theory and experiment. Rev. Sci. Instrum. 67, 3281-3293 (1996).
35. Stark, R. W., Schitter, G., Stark, M., Guckenberger, R. & Stemmer, A. State-space model of freely vibrating and surface-coupled cantilever dynamics in atomic force microscopy. Phys. Rev. B 69, 085412 (2004).
36. Schaffer, T. E. & Fuchs, H. Optimized detection of normal vibration modes of atomic force microscope cantilevers with the optical beam deflection method. J. Appl. Phys. 97, 083524 (2005).
37. Hsu, J. C., Lee, H. L. & Chang, W. J. Flexural vibration frequency of atomic force microscope cantilevers using Timoshenko beam theory. Nanotechnology 18, 285503 (2007).
38. Melcher, J., Hu, S. & Raman, A. Equivalent point-mass models of continuous atomic force microscope probes. Appl. Phys. Lett. 91, 053101 (2007).
39. Cantrell, J. H. & Cantrell, S. A. Analytical model of the nonlinear dynamics of cantilever tip-sample surface interactions for various acoustic atomic force microscopies. Phys. Rev. B 77, 165409 (2008).
40. Kokavecz, J. & Mechler, A. Spring constant of microcantilevers in fundamental and higher eigenmodes. Phys. Rev. B 78, 172101 (2008).
41. Hahner, G. Dynamic spring constants for higher flexural modes of cantilever plates with applications to atomic force microscopy. Ultramicroscopy 110, 801-806 (2010).
42. Zypman, F. Internal damping for noncontact atomic force microscopy cantilevers. J. Vac. Sci. Technol. B 28, C4E24-C4E27 (2010).
43. Abbasi, M. & Mohammadi, A. K. A new model for investigating the flexural vibration of an atomic force microscope cantilever. Ultramicroscopy 110, 1374-1379 (2010).
44. Pishkenari, H. N. & Meghdari, A. Effects of higher oscillation modes on TM-AFM measurements. Ultramicroscopy 111, 107-116 (2011).
45. Kiracofe, D. & Raman, A. On eigenmodes, stiffness, and sensitivity of atomic force microscope cantilevers in air versus liquids. J. Appl. Phys. 107, 033506 (2009). Theoretical and experimental study of the influence of the tip mass on the sensitivity and stiffness of the cantilever eigenmodes.
46. Sahin, O. et al. High-resolution imaging of elastic properties using harmonic cantilevers. Sensor Actuat. A 114, 183-190 (2004).
47. Dürig, U. Interaction sensing in dynamic force microscopy. New J. Phys. 2, 5.1-5.12 (2000).
48. Hembacher, S., Giessibl, F. J. & Mannhart, J. Force microscopy with light-atom probes. Science 305, 380-383 (2004). First experimental result reporting the use of higher harmonics to enhance spatial resolution in force microscopy.
49. Wright, C. A. & Solares, S. D. On mapping subangstrom electron clouds with force microscopy. Nano Lett. 11, 5026-5033 (2011).
50. Xu, X., Melcher, J., Basak, S., Reinferberger, R. & Raman, A. Compositional contrast of biological materials in liquids using the momentary excitation of higher eigenmodes in dynamic AFM. Phys. Rev. Lett. 102, 060801 (2009).
51. Stark, M., Stark, R. W., Heckl, W. H. & Guckenberger, R. Inverting dynamic force microscopy: From signals to time-resolved interaction forces. Proc. Natl Acad. Sci. USA 99, 8473-8478 (2002). Method to obtain time-resolved forces by recording the frequency spectra (higher harmonics) of the tip motion.
52. Sarioglu, A. F. & Solgaard, O. Modeling, design, and analysis of interferometric cantilevers for time-resolved force measurements in tapping-mode atomic force microscopy. J. Appl. Phys. 109, 064316 (2011).
53. Parlak, Z. & Degertekin, F. L. Combined quantitative ultrasonic and time-resolved interaction force AFM imaging. Rev. Sci. Instrum. 82, 013703 (2011).
54. Sahin, O., Quate, C. F., Solgaard, O. & Atalar, A. An atomic force microscope tip designed to measure time-varying nanomechanical forces. Nature Nanotech. 2, 507-514 (2007). Measurement of time-resolved forces by using the higher harmonics of the torsional cantilever deflection. Torsional higher harmonics are easier to measure than those in the flexural deflection.
55. Rodriguez, T. R. & Garcia, R. Compositional mapping of surfaces in atomic force microscopy by excitation of the second normal mode of the cantilever. Appl. Phys. Lett. 84, 449-451 (2004). Numerical simulation-based study to enhance the force sensitivity in AFM by the simultaneous excitation of two eigenmodes. These simulations provided the framework for development of bimodal AFM.
56. Martinez, N. F. et al. Bimodal atomic force microscopy imaging of isolated antibodies in air and liquid. Nanotechnology 19, 384011 (2008).
57. Proksch, R. Multifrequency, repulsive-mode amplitude-modulated atomic force microscopy. Appl. Phys. Lett. 89, 113121 (2006).
58. Kawai, S. et al. Systematic achievement of improved atomic-scale contrast via bimodal dynamic force microscopy. Phys. Rev. Lett. 103, 220801 (2009).
59. Aksoy, M. D. & Atalar, A. Force spectroscopy using bimodal frequency modulation atomic force microscopy. Phys. Rev. B 83, 075416 (2011).
60. Lozano, J. R. & Garcia, R. Theory of multifrequency AFM. Phys. Rev. Lett. 100, 076102 (2008).
61. Martinez-Martin, D., Herruzo, E. T., Dietz, C., Gomez-Herrero, J. & Garcia, R. Noninvasive protein structural fexibility mapping by bimodal dynamic force microscopy. Phys. Rev. Lett. 106, 198101 (2011).
62. Solares, S. D. & Chawla, G. Frequency response of higher cantilever eigenmodes in bimodal and trimodal tapping mode atomic force microscopy. Meas. Sci. Technol. 21, 125502 (2010).
63. Platz, D., Tholén, E. A. & Haviland, D. B. Intermodulation atomic force microscopy. Appl. Phys. Lett. 92, 153106 (2008).
64. Hutter, C., Platz, D., Tholen, E. A., Hansson, T. H. & Haviland, D. B. Reconstructing nonlinearities with intermodulation spectroscopy. Phys. Rev. Lett. 104, 050801 (2010).
65. Jesse, S., Kalinin, S. V., Proksch, R., Baddorf, A. P. & Rodriguez, B. J. Energy dissipation measurements on the nanoscale: band excitation method in scanning probe microscopy. Nanotechnology 18, 435503 (2007).
66. Agarwal, P. & Salapaka, M. V. Real time estimation of equivalent cantilever parameters in tapping mode atomic force microscopy. Appl. Phys. Lett. 95, 083113 (2009).
67. Thota, P., MacLaren, S. & Dankowitz, H. Controlling bistability in tapping mode atomic force microscopy using dual-frequency excitation. Appl. Phys. Lett. 91, 093108 (2007).
68. Dick, A. J. & Solares, S. D. Utilizing off-resonance and dual-frequency excitation to distinguish attractive and repulsive surface forces in atomic force microscopy. J. Comp. Nonlin. Dyn. 6, 031005 (2011).
69. Kawai, S., Kitamura, S., Kobayashi, D., Meguro, S. & Kawakatsu, H. An ultrasmall amplitude operation of dynamic force microscopy with second flexural mode. Appl. Phys. Lett. 86, 193107 (2005).
70. Killgore, J. P., Kelly, J. Y., Stafford, C. M., Fasolka, M. J. & Hurley, D. C. Quantitative subsurface contact resonance force microscopy of model polymer nanocomposites. Nanotechnology 22, 175706 (2011).
71. Pfeiffer, O. et al. Using higher flexural modes in non-contact force microscopy. Appl. Surf. Sci. 157, 337-342 (2000).
72. Dietz, C., Herruzo, E. T., Lozano, J. R. & Garcia, R. Nanomechanical coupling enables detection and imaging of 5 nm superparamagnetic particles in liquid. Nanotechnology 22, 125708 (2011).
73. Stark, M., Stark, R. W., Heckl, W. M. & Guckenberger, R. Spectroscopy of the anharmonic cantilever oscillations in tapping-mode atomic-force microscopy. Appl. Phys. Lett. 77, 3293-3295 (2000).
74. Sahin, O., Quate, C. F., Solgaard, O. & Atalar, A. Resonant harmonic response in tapping-mode atomic force microscopy. Phys. Rev. B 69, 165416 (2004).
75. Crittenden, S., Raman, A. & Reifenberger, R. Probing attractive forces at the nanoscale using higher-harmonic dynamic force microscopy. Phys. Rev. B 72, 235422 (2005).
76. Balantekin, M. & Atalar, A. Enhancing higher harmonics of a tapping cantilever by excitation at a submultiple of its resonance frequency. Phys. Rev. B 71, 125416 (2005).
77. Legleiter, J., Park, M., Cusick, B. & Kowalewski, T. Scanning probe acceleration microscopy (SPAM) in fluids: mapping mechanical properties of surfaces at the nanoscale. Proc. Natl Acad. Sci. USA 103, 4813-4818 (2006).
78. Preiner, J., Tang, J., Pastushenko, V. & Hinterdorfer, P. Higher harmonic atomic force microscopy: imaging of biological membranes in liquid. Phys. Rev. Lett. 99, 046102 (2007).
79. Turner, R. D., Kirkham, J., Devine, D. & Thomson, N. H. Second harmonic atomic force microscopy of living Staphylococcus aureus bacteria. Appl. Phys. Lett. 94, 043901 (2009).
80. Raman, A. et al. Mapping nanomechanical properties of live cells using multiharmonic atomic force microscopy. Nature Nanotech. 6, 809-813 (2011).
81. Martinez, N. F., Patil, S., Lozano, J. R. & Garcia, R. Enhanced compositional sensitivity in atomic force microscopy by the excitation of the first two flexural modes. Appl. Phys. Lett. 89, 153115 (2006).
82. Patil, S., Martinez, N. F., Lozano, J. R. & Garcia, R. Force microscopy imaging of individual protein molecules with sub-pico Newton force sensitivity. J. Mol. Recognit. 20, 516-523 (2007).
83. Dietz, C. et al. Nanotomography with enhanced resolution using bimodal atomic force microscopy. Appl. Phys. Lett. 92, 143107 (2008).
84. Stark, R. W. Dynamics of repulsive dual-frequency atomic force microscopy. Appl. Phys. Lett. 94, 063109 (2009).
85. Albonetti, C., Casalini, S., Borgatti, F., Floreano, L. & Biscarini, F. Morphological and mechanical properties of alkanethiol SAM investigated by bimodal AFM. Chem. Comm. 47, 8823-8825 (2011).
86. Li, W., Cleveland, J. P. & Proksch, R. Bimodal magnetic force microscopy: separation of short and long range forces. Appl. Phys. Lett. 94, 163118 (2009).
87. Stark, R. W., Naujoks, N. & Stemmer, A. Multifrequency electrostatic force microscopy in the repulsive regime. Nanotechnology 18, 065502 (2007).
88. Bostanci, U., Abak, M. K., Aktas, O. & Dâna, A. Nanoscale charging hysteresis measurements by multifrequency electrostatic force spectroscopy. Appl. Phys. Lett. 92, 093108 (2008).
89. Kawai, S. et al. Ultrasensitive detection of lateral atomic-scale interactions on graphite (0001) via bimodal dynamic force measurements. Phys. Rev. B 81, 085420 (2010). This paper reports bimodal excitation and detection of flexural and torsional modes compatible with frequency modulation AFM and ultrahigh-vacuum environments.
90. Balke, N. et al. Nanoscale mapping of ion diffusion in a lithium-ion battery cathode. Nature Nanotech. 5, 749-754 (2010). The multiparameter acquisition capabilities of the band excitation method are exploited to generate nanoscale maps of lithium-ion migration in batteries.
91. Balke, N. et al. Real space mapping of Li-ion transport in amorphous Si anodes with nanometer resolution. Nano Lett. 10, 3420-3425 (2010).
92. Sahin, O. & Erina, N. High-resolution and large dynamic range nanomechanical mapping in tapping-mode atomic force microscopy. Nanotechnology 19, 445717 (2008).
93. Dong, M., Husale, S. & Sahin, O. Determination of protein structural flexibility by microsecond force spectroscopy. Nature Nanotech. 4, 514-517 (2009).
94. Husale, S., Persson, H. H. J. & Sahin, O. DNA nanomechanics allows direct digital detection of complementary DNA and microRNA targets. Nature 462, 1075-1078 (2009).
95. Dong, M. & Sahin, O. A nanomechanical interface to rapid single-molecule interactions. Nature Commun. 2, 247 (2011).
96. Dokukin, M. E., Guz, N. V., Gaikwad, R. M., Woodworth, C. D. & Sokolov, I. Cell surface as a fractal: normal and cancerous cervical cells demonstrate different fractal behavior of surface adhesion maps at the nanoscale. Phys. Rev. Lett. 107, 028101 (2011).
97. Kolosov, O. & Yamanaka, K. Nonlinear detection of ultrasonic vibrations in an atomic-force microscope. Jpn. J. Appl. Phys. 32, L1095-L1098 (1993).
98. Hu, S., Su, C. & Arnold, W. J. Imaging of subsurface structures using atomic force acoustic microscopy at GHz frequencies. J. Appl. Phys. 109, 084324 (2011).
99. Shekhawat, G. S. & Dravid, V. P. Nanoscale imaging of buried structures via scanning near-field ultrasound holography. Science 310, 89-92 (2005). First report on nanomechanical holography experiments, providing images of subsurface features in microelectronic devices and cells.
100. Tetard, L., Passian, A. & Thundat, T. New modes for subsurface atomic force microscopy through nanomechanical coupling. Nature Nanotech. 5, 105-109 (2010).
101. Tetard, L. et al. Elastic phase response of silica nanoparticles buried in soft matter. Appl. Phys. Lett. 93, 133113 (2008).
102. Tetard, L. et al. Imaging nanoparticles in cells by nanomechanical holography. Nature Nanotech. 3, 501-505 (2008).
103. Shekhawat, G., Srivastava, A., Avashty, S. & Dravid, V. Ultrasound holography for noninvasive imaging of buried defects and interfaces for advanced interconnect architectures. Appl. Phys. Lett. 95, 263101 (2009).
104. Garcia-Sanchez, D., Paulo, A. S., Esplandiu, M. J., Perez-Murano, F. & Bachtold, A. Mechanical detection of carbon nanotube resonator vibrations. Phys. Rev. Lett. 99, 085501 (2007).
105. Garcia-Sanchez, D. et al. Imaging mechanical vibrations in suspended graphene sheets. Nano Lett. 8, 1399-1403 (2008).
106. Garcia, R. Images from below the surface. Nature Nanotech. 5, 101-102 (2010).
107. Diebold, A. C. Subsurface imaging with scanning ultrasound holography. Science 310, 61-62 (2005).