Extreme ultraviolet light source based on intracavity high harmonic generation in a mode locked Ti:sapphire oscillator with 9.4 MHz repetition rate

Optics Express

Volumn 20, Issue 6, 2012, Pages 6185-6190

  Seres, Enikoe ^a,b   Seres, Jozsef ^b   Spielmann, Christian ^a,b  

^a HELMHOLTZ INSTITUTE JENA   (Germany)

^b FRIEDRICH SCHILLER UNIVERSITY JENA   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

LASER ACCESSORIES; LIGHT SOURCES; SAPPHIRE;

EUV SOURCE; EXTREME ULTRAVIOLET LIGHT SOURCES; GAS JET; HIGH HARMONIC GENERATION; HIGH HARMONICS; HIGH-POWER; INTRACAVITIES; MODE-LOCKED; PULSE ENERGIES; REPETITION RATE; TI:SAPPHIRE OSCILLATORS;

EXTREME ULTRAVIOLET LITHOGRAPHY;

ALUMINUM OXIDE; TITANIUM;

ARTICLE; CHEMISTRY; EQUIPMENT; EQUIPMENT DESIGN; INSTRUMENTATION; LASER; OSCILLOMETRY; ULTRAVIOLET RADIATION;

ALUMINUM OXIDE; EQUIPMENT DESIGN; EQUIPMENT FAILURE ANALYSIS; LASERS; OSCILLOMETRY; TITANIUM; ULTRAVIOLET RAYS;

EID: 84858970968     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.20.006185     Document Type: Article

References (20)

1. J. Seres, E. Seres, A. J. Verhoef, G. Tempea, C. Streli, P. Wobrauschek, V. Yakovlev, A. Scrinzi, C. Spielmann, and F. Krausz, "Laser technology: source of coherent kiloelectronvolt X-rays," Nature 433(7026), 596-596 (2005).
2. E. Seres, J. Seres, and Ch. Spielmann, "X-ray absorption spectroscopy in the ke V range with laser generated high harmonic radiation," Appl. Phys. Lett. 89(18), 181919 (2006).
3. E. Seres and C. Spielmann, "Ultrafast soft x-ray absorption spectroscopy with sub-20-fs resolution," Appl. Phys. Lett. 91(12), 121919 (2007).
4. E. Seres and C. Spielmann, "Time-resolved optical pump x-ray absorption probe spectroscopy in the range up to 1 ke V with 20 fs resolution," J. Mod. Opt. 55(16), 2643-2651 (2008).
5. C. Gohle, T. Udem, M. Herrmann, J. Rauschenberger, R. Holzwarth, H. A. Schuessler, F. Krausz, and T. W. Hänsch, "A frequency comb in the extreme ultraviolet," Nature 436(7048), 234-237 (2005). (Pubitemid 41021270)
6. R. J. Jones, K. D. Moll, M. J. Thorpe, and J. Ye, "Phase-coherent frequency combs in the vacuum ultraviolet via high-harmonic generation inside a femtosecond enhancement cavity," Phys. Rev. Lett. 94(19), 193201 (2005).
7. A. Ozawa, J. Rauschenberger, Ch. Gohle, M. Herrmann, D. R. Walker, V. Pervak, A. Fernandez, R. Graf, A. Apolonski, R. Holzwarth, F. Krausz, T. W. Hänsch, and Th. Udem, "High harmonic frequency combs for high resolution spectroscopy," Phys. Rev. Lett. 100(25), 253901 (2008).
8. D. C. Yost, T. R. Schibli, J. Ye, J. L. Tate, J. Hostetter, M. B. Gaarde, and K. J. Schafer, "Vacuum-ultraviolet frequency combs from below-threshold harmonics," Nat. Phys. 5(11), 815-820 (2009).
9. J. Lee, D. R. Carlson, and R. J. Jones, "Optimizing intracavity high harmonic generation for XUV fs frequency combs," Opt. Express 19(23), 23315-23326 (2011).
10. T. J. Hammond, A. K. Mills, and D. J. Jones, "Near-threshold harmonics from a femtosecond enhancement cavity-based EUV source: effects of multiple quantum pathways on spatial profile and yield," Opt. Express 19(25), 24871-24883 (2011).
11. S. Kim, J. Jin, Y.-J. Kim, I.-Y. Park, Y. Kim, and S.-W. Kim, "High-harmonic generation by resonant plasmon field enhancement," Nature 453(7196), 757-760 (2008). (Pubitemid 351793789)
12. I.-Y. Park, S. Kim, J. Choi, D.-H. Lee, Y.-J. Kim, M. F. Kling, M. I. Stockman, and S.-W. Kim, "Plasmonic generation of ultrashort extreme-ultraviolet light pulses," Nat. Photonics 5(11), 677-681 (2011).
13. D. Herriott, H. Kogelnik, and R. Kompfner, "Off-axis paths in spherical mirror interferometers," Appl. Opt. 3(4), 523-526 (1964).
14. A. Fuerbach, G A. Fernandez, A. Apolonski, E. Seres, T. Fuji, and F. Krausz, "Generation of sub-30-fs pulses from a scaleable high-energy oscillator," Proc. SPIE 5340, 4-1 1 (2004).
15. E. Seres and Ch. Spielmann, "Development of an intracavity EUV Source based on a high power Ti:sapphire oscillator," Proc SPIE 7721, 77210I, 77210I-7 (2010).
16. T. Fuji, A. Unterhuber, V. S. Yakovlev, G. Tempea, A. Stingl, F. Krausz, and W. Drexler, "Generation of smooth, ultra-broadband spectra directly from a prism-less Ti:sapphire laser," Appl. Phys. B 77(1), 125-128 (2003).
17. A. Agnesi, E. Piccinini, and G. C. Reali, "Influence of thermal effects in Kerr-lens mode-locked femtosecond Cr 4f:forsterite lasers," Opt. Commun. 135(1-3), 77-82 (1997). (Pubitemid 127414003)
18. J. Herrmann, "Theory of Kerr-lens mode locking: role of self-focusing and radially varying gain," J. Opt. Soc. Am. B 11(3), 498-512 (1994).
19. http://henke.lbl.gov/optical-constants/.
20. G. W. Fraser, M. A. Barstow, J. F. Pearson, M. J. Whiteley, and M. Lewis, "The soft x-ray detection efficiency of coated microchannel plates," Nucl. Instrum. Methods Phys. Res. 224(1-2), 272-286 (1984). (Pubitemid 14651445)