Electro-optical properties of barium titanate films epitaxially grown on silicon

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 8263, Issue , 2012, Pages

  Abel, S ^a   Caimi, D ^a   Sousa, M ^a   Stoferle T ^a   Rossel, C ^a   Marchiori, C ^a   Chelnokov, A ^b   Fompeyrine, J ^a  

^a IBM RESEARCH ZURICH   (Switzerland)

^b CEA GRENOBLE   (France)

Author keywords

barium titanate; electro optical effect; Epitaxial growth; functional oxides; Pockels effect

Indexed keywords

ACTIVE MATERIAL; BATIO; CRYSTALLOGRAPHIC SYMMETRY; ELECTRICAL FIELD; ELECTRO-OPTICAL; ELECTROOPTICAL PROPERTIES; EPITAXIAL RELATIONSHIPS; EPITAXIALLY GROWN; FUNCTIONAL OXIDES; HIGH QUALITY; MULTIDOMAIN STRUCTURE; OPTICAL BEHAVIOR; POCKELS COEFFICIENT; POCKELS EFFECT; SEED LAYER; SI SUBSTRATES; SI(0 0 1); SILICON PHOTONICS; SINGLE-CRYSTALLINE; TUNING ELEMENTS;

BARIUM; CRYSTALLINE MATERIALS; ELECTRIC PROPERTIES; ELECTROOPTICAL EFFECTS; EPITAXIAL FILMS; EPITAXIAL GROWTH; MOLECULAR BEAM EPITAXY; OPTICAL PROPERTIES; OPTICAL SWITCHES; OXIDE FILMS; PHOTOLITHOGRAPHY; SILICON; SINGLE CRYSTALS; SUBSTRATES;

BARIUM TITANATE;

EID: 84858605380     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.908772     Document Type: Conference Paper

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