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Microelectronic Engineering

Volumn 92, Issue , 2012, Pages 149-151

Copper nanoparticles generated in situ in imidazolium based ionic liquids

(3) Arquillire, P a,b Haumesser, P H a Santini, C C b

a CEA LETI (France)

b UNIVERSITÉ DE LYON (France)

Author keywords

Copper; Ionic liquids; Nanoparticles; Seed layer

Indexed keywords

COPPER NANOPARTICLES; COPPER SEED; DIHYDROGEN; HIGH ASPECT RATIO; IMIDAZOLIUM-BASED IONIC LIQUID; IN-SITU; INTERCONNECT STRUCTURES; NARROW SIZE DISTRIBUTIONS; OPTIMAL CONDITIONS; PRESSURE AND TEMPERATURE; SEED LAYER; STABLE SUSPENSIONS; WELL-DISPERSED;

ASPECT RATIO; COPPER; METAL NANOPARTICLES; NANOPARTICLES; SIZE DISTRIBUTION; SYNTHESIS (CHEMICAL);

IONIC LIQUIDS;

EID: 84858289296 PISSN: 01679317 EISSN: None Source Type: Journal
DOI: 10.1016/j.mee.2010.11.039 Document Type: Conference Paper

Times cited : (26)

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