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Volumn 83, Issue 2, 2012, Pages
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High-energy metal ion implantation for reduction of surface resistivity of alumina ceramic
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Author keywords
[No Author keywords available]
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Indexed keywords
ALUMINA;
ELECTRIC CONDUCTIVITY;
ION BEAMS;
ION IMPLANTATION;
METAL IONS;
VACUUM APPLICATIONS;
ACCELERATED IONS;
ACCELERATING VOLTAGES;
ALUMINA CERAMIC;
BEAM IONS;
CERAMIC INSULATORS;
CHARGE NEUTRALIZATION;
EXPERIMENTAL CONDITIONS;
HIGH ENERGY;
ION ENERGIES;
SURFACE CONDUCTIVITY;
SURFACE RESISTIVITY;
VACUUM ARCS;
VACUUM CHAMBERS;
CERAMIC MATERIALS;
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EID: 84857881759
PISSN: 00346748
EISSN: None
Source Type: Journal
DOI: 10.1063/1.3670599 Document Type: Article |
Times cited : (11)
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References (5)
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