Ion beam sputtering of multicomponent targets: Surface composition change and cluster emission

Technical Physics

Volumn 57, Issue 2, 2012, Pages 247-250

  Kudryavtsev, Yu ^a  

^a DEPARTAMENTO DE FÍSICA   (Mexico)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84857603609     PISSN: 10637842     EISSN: None     Source Type: Journal    
DOI: 10.1134/S1063784212020132     Document Type: Article

References (8)

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5. P. Sigmund, in Sputtering by Particle Bombardment I, Ed. by R. Behrishc (Springer, Berlin, 1981), p. 18.
6. Yu. Kudryavtsev, "Neutral Emission from III-V Semiconductor Compounds during Destruction by Low-Energy Ions," Dissertation (St. Petersburg. Gos. Tekhn. Univ., St. Petersburg, 1998).
7. W. Z. Gerhard, Z. Physik B 22, 31 (1975).
8. Y. Yamamura, in Proceedings of the 9th International Conference on Secondary Ion Mass Spectrometry, Yokohama, 1993, Ed. by A. Benninghoven, et al. (Wiley, New York, 1994), p. 3.