Zinc oxide nanowire based hydrogen sensor on SOI CMOS platform

Procedia Engineering

Volumn 25, Issue , 2011, Pages 1473-1476

  Guha, P K ^a   Santra, S ^b   Covington, J A ^c   Udrea, F ^b,d   Gardner, J W ^c,d  

^a INDIAN INSTITUTE OF TECHNOLOGY   (India)

^b UNIVERSITY OF CAMBRIDGE   (United Kingdom)

^c UNIVERSITY OF WARWICK   (United Kingdom)

^d AMS AG   (Austria)

Author keywords

Nano material sensing layer; SOI CMOS gas sensor

Indexed keywords

DEEP REACTIVE ION ETCH; HANDHELDS; HOT PLATES; HYDROGEN SENSOR; HYDROTHERMAL METHODS; LOW COSTS; LOW POWER; LOW TEMPERATURE GROWTH; MEMS PLATFORM; METAL ELECTRODES; MICRO-HEATERS; MICROHOTPLATES; NANOMATERIAL; OPERATING TEMPERATURE; POST-CMOS; SENSING LAYERS; SILICON-ON-INSULATOR CMOS; SOI CMOS; ULTRA-LOW POWER; ZINC OXIDE NANOWIRES;

CMOS INTEGRATED CIRCUITS; FOUNDRIES; GAS DETECTORS; GAS SENSING ELECTRODES; HYDROGEN; NANOWIRES; TEMPERATURE; ZINC OXIDE;

CHEMICAL SENSORS;

EID: 84857172207     PISSN: 18777058     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1016/j.proeng.2011.12.364     Document Type: Conference Paper

References (3)

1. Iwaki T, Covington JA, Udrea F, Ali S Z, Guha PK, Gardner JW. Design and simulation of resistive SOI CMOS micro-heaters for high temperature gas sensors. J. Phys Conf. Ser.; 2005; 15:27-32.
2. Vayssieres L. Growth of arrayed nanorods and nanowires of ZnO from aqueous solutions, Adv. Mater.; 2003; 15:464-466.
3. Lupana O, Ursakic VV, Chaia G, Chowa L, Emelchenkoe GA, Tiginyanug IM, Gruzintsev AN, Redkin AN. Selective hydrogen gas nanosensor using individual ZnO nanowire with fast response at room temperature, Sensors and actuators B.; 2009; 144:56-66