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Volumn , Issue , 2011, Pages
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Hardware-assisted 3D TCAD for predictive capacitance extraction in 32nm SOI SRAMs
b
IBM
(United States)
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Author keywords
[No Author keywords available]
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Indexed keywords
6T-SRAM;
ANALYSIS/DESIGN;
BITLINE CAPACITANCE;
BODY DOPING;
CAPACITANCE EXTRACTION;
DOMINANT FACTOR;
HARDWARE-ASSISTED;
JUNCTION CAPACITANCES;
TECHNOLOGY DEVELOPMENT;
TEST STRUCTURE;
WORDLINES;
CAPACITANCE;
DYNAMIC RANDOM ACCESS STORAGE;
ELECTRON DEVICES;
SENSITIVITY ANALYSIS;
THREE DIMENSIONAL;
SILICON WAFERS;
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EID: 84857007521
PISSN: 01631918
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1109/IEDM.2011.6131673 Document Type: Conference Paper |
Times cited : (3)
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References (6)
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