A navigation-grade MEMS accelerometer based on a versatile front end

IECON Proceedings (Industrial Electronics Conference)

Volumn , Issue , 2011, Pages 4038-4043

  Pastre, Marc ^a   Kayal, Maher ^a   Schmid, Hanspeter ^b   Zwahlen, Pascal ^c   Dong, Yufeng ^c   Nguyen, Anne Marie ^c  

^a EPFL   (Switzerland)

^b UNIVERSITY OF APPLIED SCIENCES AND ARTS NORTHWESTERN SWITZERLAND   (Switzerland)

^c Colibrys SA ^*  (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITIVE ACCELEROMETERS; CDS; DIGITAL PARTS; FLASH-ADC; FRONT END; LOOP STABILITY; LOW NOISE; MEMS ACCELEROMETER; MEMS SENSORS; MIXED SIGNAL; NOISE PERFORMANCE; SENSOR PARAMETER; VOLTAGE MODE;

ACCELEROMETERS; DIGITAL FILTERS; SENSORS;

INDUSTRIAL ELECTRONICS;

EID: 84856552271     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IECON.2011.6119971     Document Type: Conference Paper

References (16)

1. th SEGJ International Symposium
2. Colibrys Accelerometer RS9010 Datasheet, http://www.colibrys.com/e/page/ 300/
3. J. Gannon, H. Pham, K. Speller, "A Robust Low Noise MEMS Accelerometer" Proc. of the ISA Emerging Technologies Conference, Houston, TX, Sept. 10-12, 2001.
4. J.M. Tsai, G.K. Fedder, "Mechanical Noise-Limited CMOS-MEMS Accelerometers", Tech. Digest MEMS 2005, Miami Beach, pp. 630-633
5. M. Lemkin, B.E. Boser, "A Three-Axis Micromachined Accelerometer with a CMOS Position-Sense Interface and Digital Offset-Trim Electronics" IEEE J. of Solid-State Circuits, Vol. 34, No. 4, pp. 456-468, April 1999
6. th-order Delta-Sigma Loop", ESSCIRC, Athens, Greece, Sept. 14-18, 2009
7. J. Wu, G. K. Fedder, L. R. Carley, "A Low-Noise Low-Offset Chopper-Stabilized Capacitive-Readout Amplifier for CMOS MEMS Accelerometers", ISSCC Dig. Tech. Papers, pp. 428-429, 478, Feb. 2002
8. J. Wu, G. K. Fedder, L. R. Carley, "A Low-Noise Low-Offset Capacitive Sensing Amplifier for a 50-uμg/√Hz Monolithic CMOS MEMS Accelerometer", IEEE J. Solid-State Circuits, Vol. 39, pp. 722-730, May 2004
9. H. Schmid, S. Sigel, M. Pastre, M. Kayal, P. Zwahlen, A.-M. Nguyen, "An Internally Non-Linear ADC for a Δ∑ Accelerometer Loop", IEEE International Symposium on Circuits and Systems (ISCAS), Vol. 1, pp. 2155-2158, May 2010
10. Z. Zhang and G. Temes, "Multibit oversampled ∑Δ A/D convertor with nonuniform quantisation," Electronics Letters, vol. 27, no. 6, pp. 528-529, Mar. 1991.
11. B. Li and H. Tenhunen, "Sigma delta modulators using semi-uniform quantizers," in Proc. ISCAS, vol. 1, Sydney, May 2001, pp. 456-459.
12. S. P. Lloyd, "Least squares quantization in PCM," IEEE Trans. Inf. Theory, vol. 28, no. 2, pp. 129-137, Mar. 1982.
13. E. T. Jaynes, Probability Theory: The Logic of Science. Cambridge University Press, 2003.
14. C. Condemine, N. Delorme, J. Soen, J. Durupt, J.-P. Blanc, M. Belleville, and A.Besançon-Voda, "A 0.8mA 50 Hz 15b SNDR Δ∑ closed-loop 10g accelerometer using an 8th-order digital compensator," in Proc. ISSCC, San Francisco, 2005, pp. 248-249.
15. P. Zwahlen, A.-M. Nguyen, Y. Dong, F. Rudolf, M. Pastre, H. Schmid, "Navigation Grade MEMS Accelerometer", IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 631-634, January 2010
16. Honeywell, QA2000 Q-Flex® Accelerometer, http://www.inertialsensor. com/qa2000.shtml