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Volumn 520, Issue 7, 2012, Pages 3039-3042
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Detection and sensing mechanism of acetone with modeling using Pd/TiO 2/Si structure
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Author keywords
Acetone; Evaporation; Gas sensors; Oxidation mechanism; Oxygen ambient; Titanium dioxide
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Indexed keywords
FABRICATED STRUCTURES;
LANGMUIRS;
MODEL-BASED OPC;
OXIDATION MECHANISM;
OXYGEN AMBIENT;
ROOM TEMPERATURE;
SENSING MECHANISM;
SENSITIVITY MEASUREMENT;
THEORY OF ELECTRONICS;
ACETONE;
ADSORPTION;
CHEMICAL SENSORS;
ETHANOL;
EVAPORATION;
GAS DETECTORS;
HYDROCARBONS;
OXYGEN;
TITANIUM;
TITANIUM DIOXIDE;
TRICHLOROETHYLENE;
CATALYTIC OXIDATION;
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EID: 84856371789
PISSN: 00406090
EISSN: None
Source Type: Journal
DOI: 10.1016/j.tsf.2011.10.158 Document Type: Article |
Times cited : (13)
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References (31)
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