Room-temperature hydrogen-sensitive characteristics of Pd/boron doped amorphous carbon film/n-Si structure

Sensors and Actuators, B: Chemical

Volumn 161, Issue 1, 2012, Pages 1102-1107

  Li, Jian Peng ^a   Xue, Qing Zhong ^a   Shan, Mei Xia ^a   Wang, Sheng ^a   Zhen, Yu Hua ^a   Han, Zhi De ^a  

^a CHINA UNIVERSITY OF PETROLEUM   (China)

Author keywords

Capacitance frequency characteristics; H 2 response; Pd B:a C n Si structure

Indexed keywords

CAPACITANCE-FREQUENCY CHARACTERISTICS; DEPOSITION TEMPERATURES; DIRECT CURRENT MAGNETRON SPUTTERING; FAST RESPONSE TIME; FREQUENCY CURVE; H 2 RESPONSE; HIGH RESPONSE; RECOVERY TIME; ROOM TEMPERATURE; SENSING MECHANISM; SENSING PROPERTY;

AMORPHOUS CARBON; CAPACITANCE; HYDROGEN; SILICON;

AMORPHOUS SILICON;

EID: 84856233581     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2011.12.033     Document Type: Article

References (33)

1. S. Mubeen, T. Zhang, B. Yoo, M.A. Deshusses, and N.V. Myung Palladium nanoparticles decorated single-walled carbon nanotube hydrogen sensor J. Phys. Chem. C 111 2007 6321 6327 (Pubitemid 46787852)
2. C.C. Cheng, Y.Y. Tsai, K.W. Lin, H.I. Chen, W.H. Hsu, C.W. Hung, R.C. Liu, and W.C. Liu Pd-oxide-Al0.24Ga0.76As (MOS) high electron mobility transistor (HEMT)-based hydrogen sensor IEEE Sens. J. 6 2006 287 292
3. T.H. Tsai, H.I. Chen, I.P. Liu, C.W. Hung, T.P. Chen, L.Y. Chen, Y.J. Liu, and W.C. Liu Investigation on a Pd-AlGaN/GaN Schottky diode-type hydrogen sensor with ultrahigh sensing responses IEEE Trans. Electron Devices 55 2008 3575 3581
4. 4 at high temperature Sens. Actuators B 77 2001 455 462 (Pubitemid 32546783)
5. P.F. Ruths, S. Ashok, S.J. Fonash, and J.M. Ruths A study of Pd/Si MIS Schottky barrier diode hydrogen detector IEEE Trans. Electron Devices 28 1981 1003 1009
6. J.M. Baik, M.H. Kim, C. Larson, C.T. Yavuz, G.D. Stucky, A.M. Wodtke, and M. Moskovits Pd-sensitized single vanadium oxide nanowires: highly responsive hydrogen sensing based on the metal-insulator transition Nano Lett. 9 2009 3980 3984
7. J. Kong, M.G. Chapline, and H. Dai Functionalized carbon nanotubes for molecular hydrogen sensors Adv. Mater. 13 2001 1384 1386
8. Y.G. Sun, and H.H. Wang Electrodeposition of Pd nanoparticles on single-walled carbon nanotubes for flexible hydrogen sensors Appl. Phys. Lett. 90 2007 213107 213109
9. F. Favier, E.C. Walter, M.P. Zach, T. Benter, and R.M. Penner Hydrogen sensors and switches from electrodeposited palladium mesowire arrays Science 293 2001 2227 2231 (Pubitemid 32900226)
10. F. Yang, D.K. Taggart, and R.M. Penner Joule heating a palladium nanowire sensor for accelerated response and recovery to hydrogen gas Small 6 2010 1422 1429
11. H.T. Wang, B.S. Kang, F. Ren, L.C. Tien, P.W. Sadik, D.P. Norton, S.J. Pearton, and J. Lin Hydrogen-selective sensing at room temperature with ZnO nanorods Appl. Phys. Lett. 86 2005 243503 243505
12. L.C. Tien, P.W. Sadik, D.P. Norton, L.F. Voss, S.J. Pearton, H.T. Wang, B.S. Kang, F. Ren, J. Jun, and J. Lin Hydrogen sensing at room temperature with Pt-coated ZnO thin films and nanorods Appl. Phys. Lett. 87 2005 222106 222108
13. W. Lim, J.S. Wright, B.P. Gila, S.J. Pearton, F. Ren, W.T. Lai, L.C. Chen, M.S. Hu, and K.H. Chen Selective-hydrogen sensing at room temperature with Pt-coated InN nanobelts Appl. Phys. Lett. 93 2008 202109 202111
14. 2 nanowire gas sensor and sensor performance for hydrogen J. Phys. Chem. C 112 2008 6643 6647
15. K. Skucha, Z. Fan, K. Jeon, A. Javey, and B. Boser Palladium/silicon nanowire Schottky barrier-based hydrogen sensors Sens. Actuators B 145 2010 232 238
16. I.I. Nedrygailov, and E.G. Karpov Pd/n-SiC nanofilm sensor for molecular hydrogen detection in oxygen atmosphere Sens. Actuators B 148 2010 388 391
17. X.L. Gao, Q.Z. Xue, L.Z. Hao, Q.B. Zheng, and Q. Li Ammonia sensitivity of amorphous carbon film/silicon heterojunctions Appl. Phys. Lett. 91 2007 122110 122112
18. Q.Z. Xue, H.J. Chen, Q. Li, K.Y. Yan, F. Besenbacher, and M.D. Dong Room-temperature high-sensitivity detection of ammonia gas using the capacitance of carbon/silicon heterojunctions Energy Environ. Sci. 3 2010 288 291
19. H.J. Chen, Q.Z. Xue, K.Y. Yan, J. Xie, X.Y. Zhou, and J.P. Li Ethanol gas sensitivity of carbon nanotip arrays/n-Si heterojunctions at room temperature J. Appl. Phys. 106 2009 053718 053721
20. X.L. Gao, Q.Z. Xue, L.Z. Hao, Q. Li, Q.B. Zheng, and P. Tian Effect of gas pressure on current-voltage characteristics of amorphous carbon film/silicon heterojunction Appl. Phys. Lett. 91 2007 092104 092106
21. H.J. Chen, Q.Z. Xue, M. Ma, and X.Y. Zhou Capacitive humidity sensor based on amorphous carbon film/n-Si heterojunctions Sens. Actuators B 150 2010 487 489
22. X.L. Gao, X.Z. Zhang, C.H. Wan, X. Zhang, L.H. Wu, and X.Y. Tan Abnormal humidity-dependent electrical properties of amorphous carbon/silicon heterojunctions Appl. Phys. Lett. 97 2010 212101 212103
23. Q.Z. Xue, X. Zhang, P. Tian, and C. Jin Anomalous current-voltage characteristics and colossal electroresistance of amorphous carbon film on Si substrate Appl. Phys. Lett. 85 2004 4397 4399 (Pubitemid 40001526)
24. G.A.J. Amaratunga, D.E. Segal, and D.R. Mckenzie Amorphous diamond-Si semiconductor heterojunctions Appl. Phys. Lett. 59 1991 69 71
25. V.S. Veerasamy, G.A.J. Amaratunga, J.S. Park, W.I. Milne, H.S. Mackenzie, and D.R. Mckenzie Photoresponse characteristics of n-type tetrahedral amorphous carbon/p-type Si heterojunction diodes Appl. Phys. Lett. 64 1994 2297 2299
26. E.K. Liu, B.S. Zhu, and J.S. Luo The Physics of Semiconductor sixth ed. 2003 Publishing House of Electronics Industry Beijing p. 206 (Chapter 6)
27. X.Y. Zhou, Q.Z. Xue, M. Ma, and J.P. Li Effect of Si substrate on ethanol gas sensing properties of ZnO films Thin Solid Films 519 2011 6151 6154
28. 2/Si Appl. Phys. Lett. 97 2010 061902 061904
29. Q.Z. Xue, and X. Zhang Anomalous electrical transport properties of amorphous carbon films on Si substrates Carbon 43 2005 760 764 (Pubitemid 40211995)
30. R.O. Dillon, J.A. Woollam, and V. Katkanant Use of Raman scattering to investigate disorder and crystallite formation in as-deposited and annealed carbon films Phys. Rev. B 29 1984 3482 3489
31. A.C. Ferrari, and J. Robertson Interpretation of Raman spectra of disordered and amorphous carbon Phys. Rev. B 61 2000 14095 14107
32. M. Chhowalla, J. Roberson, C.W. Chen, S.R.P. Silva, C.A. Davis, G.A.J. Amaratunga, and W.I. Milne Influence of ion energy and substrate temperature on the optical and electronic properties of tetrahedral amorphous carbon (ta-C) films J. Appl. Phys. 81 1997 139 145 (Pubitemid 127648464)
33. x/Si hydrogen sensor Sens. Actuators 2 1982 363 369 (Pubitemid 13504979)