Surface acoustic wave hydrogen sensors based on ZnO nanoparticles incorporated with a Pt catalyst

Sensors and Actuators, B: Chemical

Volumn 161, Issue 1, 2012, Pages 341-348

  Phan, Duy Thach ^a   Chung, Gwiy Sang ^a  

^a University of Ulsan   (South Korea)

Author keywords

AlN thin film; Hydrogen sensor; Pt catalyst; SAW; ZnO nanoparticles

Indexed keywords

ALN; ALN THIN FILMS; CRYSTALLINE QUALITY; FREQUENCY SHIFT; FUNDAMENTAL FREQUENCIES; HYDROGEN DETECTION; HYDROGEN SENSOR; HYDROGEN-SENSING; INTER-DIGITATED ELECTRODES; LAYERED STRUCTURES; PT CATALYST; PT CATALYSTS; RF-SPUTTERING; ROOM TEMPERATURE; SAW DELAY LINE; SAW SENSORS; SAW STRUCTURE; SENSING LAYERS; SURFACE ACOUSTIC WAVES; ZNO; ZNO NANOPARTICLES;

ACOUSTIC SURFACE WAVE DEVICES; ACOUSTIC WAVES; ACOUSTICS; ACOUSTOELECTRIC EFFECTS; ALUMINUM COATINGS; ALUMINUM NITRIDE; CATALYST SUPPORTS; CHEMICAL SENSORS; CRYSTALLITE SIZE; HYDROGEN; NITRIDES; PLATINUM; SAWS; SOL-GEL PROCESS; WAVES; ZINC OXIDE;

NANOPARTICLES;

EID: 84856223074     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2011.10.042     Document Type: Article

References (23)

1. F.C. Huang, Y.Y. Chen, and T.T. Wu A room temperature surface acoustic wave hydrogen sensor with Pt coated ZnO nanorods Nanotechnology 20 2009 065501(6pp.)
2. 3 SAW hydrogen gas sensor Thin Solid Films 515 2007 8705 8708 (Pubitemid 47444383)
3. Y.S. Huang, Y.Y. Chen, and T.T. Wu A passive wireless hydrogen sensor surface acoustic wave sensor based on Pt-coated ZnO nanorods Nanotechnology 21 2010 095503(6pp.)
4. 2 sensing Sens. Actuators B 138 2009 85 89
5. S.J. Ippolito, S. Kandasamy, K. Kalantar-Zadeh, and W. Wlodarski Layered SAW hydrogen sensor with modified tungsten trioxide selective layer Sens. Actuators B 108 2005 553 557
6. C.S. Rout, A.R. Raju, A. Govindaraj, and C.N.R. Rao Hydrogen sensors based on ZnO nanoparticles Solid State Commun. 138 2006 136 138
7. S. Shukla, S. Patil, S.C. Kuiry, Z. Rahman, T. Du, L. Ludwig, C. Parish, and S. Seal Synthesis and characterization of sol-gel derived nanocrystalline tin oxide thin film as hydrogen sensor Sens. Actuators B 96 2003 343 353
8. G.S. Chung, and J.M. Jeong Fabrication of micro heaters on polycrystalline 3C-SiC suspended membranes for gas sensors and their characteristics Microelectron. Eng. 87 2010 2348 2352
9. L.C. Tien, P.W. Sadik, D.P. Norton, L.F. Voss, S.J. Pearton, H.T. Wang, B.S. Kang, F. Ren, J. Jun, and J. Lin Hydrogen sensing at room temperature with Pt-coated ZnO thin films and nanorods Appl. Phys. Lett. 87 2005 222106
10. H.T. Wang, B.S. Kang, F. Ren, L.C. Tien, P.W. Sadik, D.P. Norton, S.J. Pearton, and J. Lin Detection of hydrogen at room temperature with catalyst-coated multiple ZnO nanorods Appl. Phys. A 81 2005 1117 1119 (Pubitemid 41241876)
11. B. Weintraub, Y. Deng, and Z.L. Wang Position-controlled seedless growth of ZnO nanorod arrays on a polymer substrate via wet chemical synthesis J. Phys. Chem. C 111 2007 10162 10165 (Pubitemid 47184419)
12. J. Eriksson, V. Khranovskyy, F. Soderlind, P.O. Kall, R. Yakimova, and A.L. Spetz ZnO nanoparticles or ZnO films: a comparison of the gas sensing capabilities Sens. Actuators B 137 2009 94 102
13. K.S. Kim, and G.S. Chung Characterization of porous cubic silicon carbide deposited with Pd and Pt nanoparticles as a hydrogen sensor Sens. Actuators B 157 2011 482 487
14. N. Dewan, S.P. Singh, K. Sreenivas, and V. Gupta Influence of temperature stability on the sensing properties of SAW NOx sensor Sens. Actuators B 124 2007 329 335 (Pubitemid 46874017)
15. H.S. Hong, and G.S. Chung Surface acoustic wave humidity sensor based on polycrystalline AlN thin film coated with sol-gel derived nanocrystalline zinc oxide film Sens. Actuators B 148 2010 347 352
16. K. Kalantar-Zadeh, D. Powell, W. Wlodarski, S. Ippolito, and K. Galatsis Comparison of layered based SAW sensors Sens. Actuators B 91 2003 303 308
17. S.H. Hoang, and G.S. Chung Surface acoustic wave characteristics of AlN thin films grown on a polycrystalline 3C-SiC buffer layer Microelectron. Eng. 86 2009 2149 2152
18. C. Caliendo, P. Verardi, E. Verona, A. D'Amico, C. Di Natale, G. Saggio, M. Serafini, R. Paolesse, and S.E. Huq Advances in SAW-based gas sensors Smart Mater. Struct. 6 1997 689 699 (Pubitemid 127661969)
19. D.T. Phan, and G.S. Chung Comparison of ZnO thin films grown on a polycrystalline 3C-SiC buffer layer by RF magnetron sputtering and a sol-gel method Appl. Surf. Sci. 257 2011 3285 3290
20. Z.B. Fang, Z.J. Yan, Y.S. Tan, X.Q. Liu, and Y.Y. Wang Influence of post-annealing treatment on the structure properties of ZnO films Appl. Surf. Sci. 241 2005 303 308 (Pubitemid 40079562)
21. D. Song, P. Widenborg, W. Chin, and A.G. Aberle Investigation of lateral parameter variations of Al-doped zinc oxide films prepared on glass substrates by RF magnetron sputtering Sol. Energy Mater. Sol. Cells 73 2002 1 20 (Pubitemid 34295625)
22. V.S. Chivukula, D. Ciplys, R. Rimeika, M.S. Shur, J. Yang, and R. Gaska Impact of photocapacitance on phase response of GaN/sapphire SAW UV sensor IEEE Sens. J. 10 2010 883 887
23. S. Srivastava, S.S. Sharma, S. Agrawal, S. Kumar, M. Singh, and Y.K. Vijay Study of chemiresistor type CNT doped polyaniline gas sensor Synth. Met. 160 2010 529 534