Accurate stopping power determination of 15N ions for hydrogen depth profiling by a combination of ion beams and synchrotron radiation

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 273, Issue , 2012, Pages 18-21

  Zier, M ^a   Reinholz, U ^b   Riesemeier, H ^b   Radtke, M ^b   Munnik, F ^b  

^a INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH   (Germany)

^b BAM FEDERAL INSTITUTE FOR MATERIALS RESEARCH AND TESTING   (Germany)

Author keywords

Hydrogen depth profiling; Linear energy transfer; Nuclear reaction analysis; Stopping cross section; Synchrotron radiation; XRR

Indexed keywords

CROSS SECTION; HYDROGEN DEPTH PROFILING; LINEAR ENERGY TRANSFER; NUCLEAR REACTION ANALYSIS; XRR;

AMORPHOUS SILICON; ENERGY TRANSFER; HYDROGEN; IONS; NUCLEAR PHYSICS; QUALITY ASSURANCE; QUALITY CONTROL; SYNCHROTRON RADIATION; SYNCHROTRONS;

DEPTH PROFILING;

EID: 84856116247     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2011.07.027     Document Type: Conference Paper

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