Selective patterning of Si-based biosensor surfaces using isotropic silicon etchants

Journal of Colloid and Interface Science

Volumn 369, Issue 1, 2012, Pages 477-481

  Biggs, Bradley W ^a   Hunt, Heather K ^a,b   Armani, Andrea M ^a  

^a University of Southern California ^*  (United States)

^b UNIVERSITY OF MISSOURI   (United States)

Author keywords

Bioconjugation; Biological sensors; Surface immobilization

Indexed keywords

BIO-CONJUGATION; BIODETECTION; BIOLOGICAL SENSORS; DEVICE PERFORMANCE; DEVICE SURFACES; INTEGRATED DEVICE; LABEL-FREE BIOSENSOR; MEDICAL DIAGNOSTICS; SELECTIVE PATTERNING; SENSOR SURFACES; SI-BASED; SILANE COUPLING; SILANE COUPLING AGENT; SURFACE IMMOBILIZATION; XENON DIFLUORIDE;

COUPLING AGENTS; LIGANDS; MOLECULAR BIOLOGY; SEMICONDUCTING SILICON COMPOUNDS; SENSORS; SILICA; SILICON WAFERS;

BIOSENSORS;

SILICON DERIVATIVE; UNCLASSIFIED DRUG; XENON DIFLUORIDE;

ARTICLE; BIOSENSOR; CONJUGATION; CONTROLLED STUDY; NANOFABRICATION; PRIORITY JOURNAL; SURFACE PROPERTY;

BIOSENSING TECHNIQUES; SILICON; SILICON DIOXIDE; SURFACE PROPERTIES;

EID: 84856084443     PISSN: 00219797     EISSN: 10957103     Source Type: Journal    
DOI: 10.1016/j.jcis.2011.11.082     Document Type: Article

References (39)

1. Hunt H.K., Armani A.M. Nanoscale 2010, 2:1544.
2. Luchansky M.S., Washburn A.L., McClellan M.S., Bailey R.C. Lab on a Chip 2011, 11:2042.
3. Wu G.H., Datar R.H., Hansen K.M., Thundat T., Cote R.J., Majumdar A. Nature Biotechnology 2001, 19:856.
4. Ishikawa F.N., Chang H.K., Curreli M., Liao H.I., Olson C.A., Chen P.C., Zhang R., Roberts R.W., Sun R., Cote R.J., Thompson M.E., Zhou C.W. ACS Nano 2009, 3:1219.
5. Washburn A., Gunn L.C., Bailey R.C. Analytical Chemistry 2009, 81.
6. Hunt H.K., Soteropulos C., Armani A.M. Sensors 2010, 10:9317.
7. Collins S.E., Lassalle V., Ferreira M.L. Journal of Molecular Catalysis B: Enzymatic 2011, 72:220.
8. Keighley S.D., Li P., Estrela P., Migliorato P. Biosensors and Bioelectronics 2008, 23:1291.
9. Pal S., Kim M.J., Song J.M. Lab on a Chip 2008, 8:1332.
10. Li H., He J., Zhao Y., Wu D., Cai Y., Wei Q., Yang M. Electrochimica Acta 2011, 56:2960.
11. Satija J., Sai V.V.R., Mukherji S. Journal of Materials Chemistry 2011, 21:14367.
12. Goddard J.M., Erickson D. Analytical and Bioanalytical Chemistry 2009, 394:469.
13. Cooper M.A. Analytical and Bioanalytical Chemistry 2003, 377:834.
14. Goddard J.M., Mandal S., Nugen S.R., Baeumner A.J., Erickson D. Colloids and Surfaces B: Biointerfaces 2010, 76:375.
15. Singh G., Griesser H.J., Bremmell K., Kingshott P. Advanced Functional Materials 2011, 21:540.
16. Suarez G., Keegan N., Spoors J.A., Ortiz P., Jackson R.J., Hedley J., Borrise X., McNeil C.J. Langmuir 2010, 26:6071.
17. Braunschweig A.B., Huo F.W., Mirkin C.A. Nature Chemistry 2009, 1:353.
18. Goddard J.M., Mandal S., Nugen S.R., Baeumner A.J., Erickson D. Colloids and Surfaces B - Biointerfaces 2010, 76:375.
19. Arumugam S., Popik V.V. Journal of the American Chemical Society 2011, 133:15730.
20. Wylie R.G., Ahsan S., Aizawa Y., Maxwell K.L., Morshead C.M., Shoichet M.S. Nature Materials 2011, 10:799.
21. Sweetman M.J., Shearer C.J., Shapter J.G., Voelcker N.H. Langmuir 2011, 27:9497.
22. Hunt H.K., Armani A.M. Optics Letters 2011, 36:1092.
23. Armani D.K., Kippenberg T.J., Spillane S.M., Vahala K.J. Nature 2003, 421:925.
24. Timurdogana E., Alacab B.E., Kavaklic I.H., Urey H. Biosensors and Bioelectronics 2011, 28:189.
25. Zhanga G.-J., Huanga M.J., Anga J.A.J., Liub E.T., Desai K.V. Biosensors and Bioelectronics 2011, 26:3233.
26. Kovacs G.T.A. Micromachined Transducers Sourcebook 1998, McGraw Hill, New York.
27. Morita M., Ohmi T., Hasegawa E., Kawakami M., Ohwada M. Journal of Applied Physics 1990, 68:1272.
28. Nemanick E.J., Hurley P.T., Webb L.J., Knapp D.W., Michalak D.J., Brunschwig B.S., Lewis N.S. The Journal of Physical Chemistry B 2006, 110:14770.
29. Williams T.S., Hicks R.F. Journal of Vacuum Science & Technology, A: Vacuum, Surfaces, and Films 2011, 29.
30. Hanson E.L., Schwartz J., Nickel B., Koch N., Danisman M.F. Journal of the American Chemical Society 2003, 125:16074.
31. Habib S.B., Gonzalez E., Hicks R.F. Journal of Vacuum Science & Technology, A: Vacuum, Surfaces, and Films 2010, 28:476.
32. Hayashi T., Castner T.G., Boyd R.W. Chemical Physics Letters 1983, 94:461.
33. Barnes W.L. Journal of Modern Optics 1998, 45:661.
34. Schoolcraft T.A., Garrison B.J. Journal of the American Chemical Society 1991, 113:8221.
35. Li Y.L., Pullman D.P., Yang J.J., Tsekouras A.A., Gosalvez D.B., Laughlin K.B., Zhang Z., Schulberg M.T., Gladstone D.J., McGonigal M., Ceyer S.T. Physical Review Letters 1995, 74:2603.
36. Hefty R.C., Holt J.R., Tate M.R., Ceyer S.T. Journal of Chemical Physics 2008, 129:14.
37. Hefty R.C., Holt J.R., Tate M.R., Ceyer S.T. Journal of Chemical Physics 2009, 130:13.
38. Garrison B.J., Goddard W.A. Physical Review B 1987, 36:9805.
39. Winters H.F., Coburn J.W. Surface Science Reports 1992, 14:161.