Scanning helium ion microscopy

Advances in Imaging and Electron Physics

Volumn 170, Issue , 2012, Pages 65-148

  Hill, Ray ^a   Notte, John A ^a   Scipioni, Larry ^a  

^a Carl Zeiss Vision Inc USA   (United States)

Author keywords

GFIS; Helium ion source; high resolution imaging; HIM; scanning ion microscope

Indexed keywords

CRYOGENICS; GAS INDUSTRY; ION MICROSCOPES; ION SOURCES; IONIZATION OF GASES; NATURAL GAS FIELDS; SCANNING;

CRYOGENIC COOLING SYSTEM; GAS FIELD ION SOURCES; GFIS; HELIUM ION MICROSCOPE (HIM); HELIUM ION MICROSCOPIES; HELIUM ION SOURCES; HIGH-RESOLUTION IMAGING; SCANNING ION MICROSCOPES;

HELIUM;

EID: 84855921851     PISSN: 10765670     EISSN: None     Source Type: Book Series    
DOI: 10.1016/B978-0-12-394396-5.00002-6     Document Type: Chapter

References (84)

1. Agostinelli T., Lilliu S., Labram J.G., Campoy-Quiles M., Hampton M., Pires E., and Macdonald J.E. Real-time investigation of crystallization and phase-segregation dynamics in P3HT:PCBM solar cells during thermal annealing Advanced Functional Materials 21 9 2011 1701 1708
2. Baragiola R.A., Alonso E.V., Ferron J., and Oliva-Florio A. Ion-induced electron emission from clean metals Surface Science 90 1979 240 255
3. Barradas N.P., Arstila K., Battistig G., Bianconi M., Dytlewski N., Jeynes C., and Thompson M. International Atomic Energy Agency intercomparison of ion beam analysis software Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 262 2007 281 303 SIMNRA home page. Available at http://www.rzg.mpg.de/∼mam/Version6.html. (Pubitemid 47263543)
4. Barth J.E., and Kruit P. Addition of different contributions to the charged particle probe size Optik 101 1996 101 109 (Pubitemid 126569211)
5. Bell D.C. Contrast mechanisms and image formation in helium ion microscopy Microscopy and Microanalysis 15 2009 147 153
6. Benninghoven A., Rdenauer F.G., and Werner H.W. Secondary Ion Mass Spectroscopy 1987 John Wiley & Sons New York
7. Boden S.A., Moktadir Z., Bagnall D.M., Mizuta H., and Rutt H.N. Focused helium ion beam milling and deposition Microelectronic Engineering 88 8 2011 2452 2455
8. Bryl R., and Szczepkowicz A. A method of microtip fabrication based on oxygen induced faceting Applied Surface Science 241 2005 431 434 (Pubitemid 40085030)
9. 4 He backscattered from solid surfaces Surface Science 35 1973 345 361
10. Chabala J.M., Levi-Setti R., and Wang Y.L. Practical resolution limits of imaging microanalysis with a scanning ion microscope Applied Surface Science 32 1988 10 32 (Pubitemid 18625278)
11. Cohen N.P., Foster R.J., and Mow V.C. Composition and dynamics of articular cartilage: Structure, function, and maintaining healthy state Journal of Orthopaedic & Sports Physical Therapy 28 4 1998 203 215 (Pubitemid 28470977)
12. Ernst N., Bozdech G., Schmidt H., Schmidt W.A., and Larkins G.L. On the full-width-at-half-maximum of field ion energy distributions Applied Surface Science 67 1993 111 117 (Pubitemid 23635184)
13. Everhart T.E., and Thornley R.F.M. Wide-band detector for micro-microampere low-energy electron currents Journal of Scientific Instruments 37 7 1960 246 248
14. Feldman L.C., and Mayer J.W. Fundamentals of Surface and Thin Film Analysis 1986 PTR Prentice-Hall Upper Saddle River, NJ
15. Gierak J., Schiedt B., Lucot D., Madouri A., Bourhis E., Patriarche G., and Jede R. Challenges and opportunities for focused ion beam processing at the nano-scale Microscopy Today 17 5 2009 14 17
16. Goldstein J.I., Newbury D.E., Joy D.C., Lyman C.E., Echlin P., Lifshin E., and Michael J.R. Scanning Electron Microscopy and X-Ray Microanalysis 3rd ed. 2003 Kluwer Academic/Plenum Publishers New York
17. Gomer R. Field Emission and Field Ionization 1993 American Institute of Physics New York Reprinted as part of the American Vacuum Society Classics Series
18. Hill R., and Faridur Rahman F.H.M. Advances in helium ion microscopy Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment 645 2011 96 101
19. Inai K., Ohya K., and Ishitani T. Simulation study of image contrast and spatial resolution in the helium ion microscope Journal of Electron Microscopy 56 2007 163 170
20. Itakura T., Horiuchi K., and Nakayama N. Microprobe of helium ions Journal of Vacuum Science & Technology B 9 5 1991 2596 2601
21. Janssen A.P., and Jones J.P. The effect of neon on helium ion imaging in the field ion microscope Surface Science 33 1972 553 564
22. Joy D.C., and Griffin B.J. Is microanalysis possible in the helium ion microscope? Microscopy and Microanalysis 17 4 2011 643 649
23. Joy D.C., Prasad M.S., and Meyer H.M. Experimental secondary electron spectra under SEM conditions Journal of Microscopy 215 1 2004 77 85 (Pubitemid 38845128)
24. Kostinski S., and Yao N. Rutherford backscattering oscillation in scanning helium-ion microscopy Journal of Applied Physics 109 2011 064311 17
25. Kuo H.S., Hwang I.S., Fu T.Y., Hwang Y.S., Lu Y.H., Lin C.Y., and Tsong T.T. A single-atom sharp iridium tip as an emitter of gas field ion sources Nanotechnology 20 2009 335701 15
26. Kuo H.S., Hwang I.S., Fu T.Y., Lin Y.C., Chang C.C., and Tsong T.T. Noble metal/W(111) single-atom tips and their field electron and ion emission characteristics Japanese Journal of Applied Physics 45 11 2006 8972 8983 (Pubitemid 47253182)
27. Lesuffleur A., Im H., Lindquist N.C., and Oh S.-H. Periodic nanohole arrays with shape-enhanced plasmon resonance as real-time biosensors Applied Physics Letters 90 2007 243110
28. Livengood R., Tan S., Greenzweig Y., Notte J., and McVey S. Subsurface damage from helium ions as a function of dose, beam energy, and dose rate Journal of Vacuum Science & Technology B 27 6 2009 3244 3249
29. McGuiness P.E. Seeing at atomic resolution is believing: Welcome the helium ion microscope Scanning 27 6 2005 323
30. Melmed A.J. Recollections of Erwin Mllers laboratory: The development of FIM (19511956) Applied Surface Science 94/95 1996 17 25 (Pubitemid 126348215)
31. Melngailis J. Critical review: Focused ion beam technology and applications Journal of Vacuum Science & Technology B 5 1987 469 495
32. Mendler M., Eich-Bender S., Vaughan L., Winterhalter K., and Bruckner P. Cartilage contains mixed fibrils of collagen types II, IX, and XI Journal of Cellular Biology 108 1989 191 197
33. Miller T., Knoblauch A., and Kalbitzer S. Atomic structure and electrical properties of a supertip gas field-ion source Materials Science Forum 248249 1997 433 438 (Pubitemid 127585946)
34. Mousa M.S. Characteristics of a high brightness gaseous field ion source employing tungsten-carbon doped NiAl needles Ultramicroscopy 111 2011 421 425
35. Mller E.W., and Bahadur K. Field ionization of gases at a metal surface and the resolution of the field ion microscope Physical Review 102 3 1956 624 631
36. Mller E.W., and Tsong T.T. Field Ion Microscopy: Principles and Applications 1969 American Elsevier Publishing Company, Inc. New York
37. Nishikawa O., and Mller E.W. Operation of the field ion microscope with neon Journal of Applied Physics 35 10 1964 2806 2812
38. Notte J., Faridur Rahman F.H.M., McVey S., Tan S., and Livengood R.H. Neon gas field ion sourcestability and lifetime Microscopy and Microanalysis 16 2 2010 28 29
39. + ion beam scanning transmission microscope Microscopy and Microanalysis 16 2010 599 603
40. Oatley C.W. The Scanning Electron Microscope: Part I: The Instrument 1972 Cambridge University Press Cambridge 99 101
41. Oatley C.W., Nixon W.C., and Pease R.F.W. Scanning electron microscopy Advances in Electronics and Electron Physics 21 1965 181 247
42. Ogawa S., Thompson W., Stern L., Scipioni L., Notte J., Farkas L., and Barriss L. Helium ion secondary electron mode microscopy for interconnect material imaging Japanese Journal of Applied Physics 49 4 2010 04DB1204DB12-4
43. Ohya K., and Ishitani T. Imaging using electrons and ion beams N. Yao, Focused Ion Beam Systems: Basics and Applications 2007 Cambridge University Press New York 87 125
44. Orloff J., Swanson L.W., and Utlaut M. Fundamental limits to imaging resolution for focused ion beams Journal of Vacuum Science & Technology B 14 1996 3759 3763 (Pubitemid 126582769)
45. Orloff J., Utlaut M., and Swanson L. High Resolution Focused Ion Beams: FIB and Its Applications 2003 Kluwer Academic/Plenum Publishers New York
46. Owen G., and Rissman P. Proximity effect correction for electron beam lithography by equalization of background dose Journal of Applied Physics 54 6 1983 3573 3581 (Pubitemid 13577440)
47. Petrov Y.V., Vyvenko O.F., and Bondarenko A.S. Scanning helium ion microscope: Distribution of secondary electrons and ion channeling Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques 4 5 2010 792 795
48. Rabalais J.W. Principles and Applications of Ion Scattering Spectroscopy 2003 John Wiley & Sons Hoboken, NJ
49. Rahman F., Onoda J., Imaizumi K., and Mizuno S. Field-assisted oxygen etching for sharp field-emission tip Surface Science 602 12 2008 2128 2134
50. Ramachandra R., Griffin B., and Joy D. A model of secondary electron imaging in the helium ion scanning microscope Ultramicroscopy 109 6 2009 748 757
51. Reimer L. Scanning Electron Microscopy: Physics of Image Formation and Microanalysis 1998 Springer New York
52. Rezeq M., Pitters J., and Wolkow R. Tungsten nanotip fabrication by spatially controlled field-assisted reaction with nitrogen Journal of Chemical Physics 124 2006 204716 16
53. Rutherford E. The scattering of α and β particles by matter and the structure of the atom Philosophical Magazine 6 21 1911 669 688
54. Schatten H. Low voltage high-resolution SEM (LVHRSEM) for biological structural and molecular analysis Micron 42 2011 175 185
55. Schmidt W., Reisner T., and Krautz E. Field ion microscope observation of interaction phenomena of neon atoms with platinum and platinum-gold alloy surfaces Surface Science 26 1971 297 302
56. Schwoebel P.R., and Hanson G.R. Beam current stability from localized emission sites in a field ion source Journal of Vacuum Science & Technology B 3 1985 214 219
57. Scipioni L., Ferranti D., Smentkowski V., and Potyrailo R. Fabrication and initial characterization of ultra-high aspect ratio vias in gold using the helium ion microscope Journal of Vacuum Science & Technology B 28 6 2010 C6P18
58. Scipioni L., Sanford C., Maas D., and van Veldhoven E. A design-of-experiments approach to characterizing beam-induced deposition in the helium ion microscope Microscopy Today 19 3 2011 22 26
59. Sidorkin V., van Veldhoven E., van der Drift E., Alkemade P., Salemink H., and Maas D. Sub-10-nm nanolithography with a scanning helium beam Journal of Vacuum Science & Technology B 27 4 2009 L18 L20
60. Sijbrandij S., Notte J., Scipioni L., Huynh C., and Sanford C. Analysis and metrology with a focused helium ion beam Journal of Vacuum Science & Technology B 28 1 2010 73 77
61. Sijbrandij S., Notte J., Sanford C., and Hill R. Analysis of subsurface beam spread and its impact on the image resolution of the helium ion microscope Journal of Vacuum Science & Technology B 28 6 2010 C6F6C6F9
62. Sijbrandij S., Thompson B., Notte J., Ward B.W., and Economou N.P. Elemental analysis with the helium ion microscope Journal of Vacuum Science & Technology B 26 6 2008 2103 2106
63. Smeets R.M.M., Keyser U.F., Krapf D., Wu M.-Y., Dekker N.H., and Dekker C. Salt dependence of ion transport and DNA translocation through solid-state nanopores Nano Letters 6 1 2006 89 95 (Pubitemid 43166107)
64. Smith D., Joy D.C., and Rack P. Monte Carlo simulations of focused helium ion beam induced deposition Nanotechnology 21 2010 175302
65. Smith K.C.A., Wells O.C., and McMullen D. The fiftieth anniversary of the first applications of the scanning electron microscope Physics Procedia 1 2008 3 12
66. Tan S., Livengood R., Shima D., Notte J., and McVey S. Gas field ion source and liquid metal ion source charged particle material interaction study for semiconductor nanomachining applications Journal of Vacuum Science & Technology B 28 6 2010 C6F15C6F21
67. Tesmer J.R., and Nastasi M. Handbook of Modern Ion Beam Materials Analysis 1995 Materials Research Society Pittsburgh, PA
68. Thompson W., Armstrong A., Etchin S., Hill R., Kalbitzer S., Percival R., and Wilbertz C. Toward a commercial gas field ion source Electron-Beam, X-Ray, EUV, and Ion-Beam Submicrometer Lithographies for Manufacturing V (Proceedings Volume) 2437 1995 284 290
69. Tondare V.N. Quest for high brightness, monochromatic noble gas ion sources Journal of Vacuum Science & Technology A 23 2005 1498 1508 (Pubitemid 43123931)
70. Tsong T.T. Measurement of the field evaporation rate of several transition metals Journal of Physics F: Metal Physics 8 7 1978 1349 1352
71. Tsong T.T., and Mller E.W. Measurement of the energy distribution in field ionization Journal of Chemical Physics 41 11 1964 3279 3284
72. Utke I., Hoffmann P., and Melngailis J. Gas-assisted focused electron beam and ion beam processing and fabrication Journal of Vacuum Science & Technology B 26 4 2008 1197 1276
73. van Bavel S.S., Brenklau M., de With G., Hoppe H., and Loos J. P3HT/PCBM bulk heterojunction solar cells: Impact of blend composition and 3D morphology on device performance Advanced Functional Materails 20 9 2010 1458 1463
74. van Veldhoven E., Alkemade P., van der Drift E., Sanford C., Scipioni L., Salemink H., and Maas D. Fine and dense nanofabrication with helium ion beam induced deposition Journal of Vacuum Science & Technology B 28 6 2010 C6 F22
75. Vladr A.E., and Postek M.T. The scanning electron microscope J. Orloff, Handbook of Charged Particle Optics 2nd ed. 2009 CRC Press New York 437 496
76. Waclawski B.J., and Mller E.W. Operation of the field ion microscope with a dynamic gas supply Journal of Applied Physics 32 8 1961 1472 1475
77. Ward, B. W. (2004). ALIS Company. Available at http://www.nsti.org/ Nanotech2004/show abstract.html?absno = 911.
78. Ward B.W., Notte J.A., and Economou N.P. Helium ion microscope: A new tool for nanoscale microscopy and metrology Journal of Vacuum Science & Technology B 24 2006 2871 2874 (Pubitemid 44866430)
79. Winston D., Cord B., Ming B., Bell D., DiNatale W., Stern L., and Berggren K. Scanning-helium-ion-beam lithography with hydrogen silsesquioxane resist Journal of Vacuum Science & Technology B 27 6 2009 2702 2706
80. Xin H., Ercius P., Hughes K., Engstrom J., and Muller D. Three-dimensional imaging of pore structures inside low-k dielectrics Applied Physics Letters 96 2010 223108
81. Yang J., Ferranti D.C., Stern L.A., Sanford C.A., Huang J., Ren Z., and Hall A.R. Rapid and precise scanning helium microscope milling of solid-state nanopores for biomolecule detection Nanotechnology 22 28 2011 285310
82. Zhang R., and Ma P. Biomimetic polymer/apatite composite scaffolds for mineralized tissue engineering Macromolecular Bioscience 4 2004 100 111 (Pubitemid 39256275)
83. Zhou Y., and Loh K.P. Making patterns on graphene Advanced Materials 22 2010 3615 3620
84. Ziegler J.F., Biersack J.P., and Littmark U. The Stopping and Range of Ions in Matter Vol. 1 1985 Pergamon Press New York