Approaches to hydrogenation of silicon tetrachloride in polysilicon manufacture

Russian Microelectronics

Volumn 40, Issue 8, 2011, Pages 559-561

  Ivanov, V M ^a   Trubitsin, Yu V ^a  

^a Melitopol Institute of Public And Municipal Administration of the 'Classic Private University'   (Ukraine)

Author keywords

Activa tion; Conversion efficiency; Converter; Hydrogenation; Plasma chemical reaction; Plasma source; Polysilicon; Reducing agents; Silicon tetrachloride; Trichlorosilane

Indexed keywords

CATALYTIC HYDROGENATION; CONVERTER; PLASMA CHEMICAL REACTION; PRODUCTION COST; RESEARCH AND DEVELOPMENT; SILICON TETRACHLORIDE; TRICHLOROSILANES;

CONVERSION EFFICIENCY; HYDROGENATION; PLASMA SOURCES; POLYSILICON; REDUCING AGENTS;

MANUFACTURE;

EID: 84855886289     PISSN: 10637397     EISSN: None     Source Type: Journal    
DOI: 10.1134/S1063739711080099     Document Type: Review

References (9)

1. Ivanov, V.M. and Trubitsin, Yu.V., Feasibility of Polysilicon Manufacture on a Closed-Circuit Basis, Novi Tekhnol., 2010, no. 1, pp. 53-58.
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3. Dement'ev, Yu.S., Structural Investigation of Silicon Rods Formed in Hydrogen Reduction of Silicon Chlorides, Cand. Sci. (Eng.) Dissertation, Moscow, 1969.
4. Trubitsin, Yu.V., Zverev, S.V., and Nagornyi, S.L., Behavior of a Si-H-Cl Multicomponent System during Silicon Tetrachloride Hydrogenation, Skladni Sistemi Protsesi, 2002, no. 2, pp. 54-61.
5. Trubitsin, V.Yu., Levinzon, D.I., and Trubitsin, Yu.V., Novitni Tekhnol., 2005, nos. 1-2 (7-8), pp. 21-32.
6. Proc. 4th Solar Silicon Conf., Münich, 2007.
7. Coleman, L.M., US Patent 4340574, 1982.
8. Sarma, K.R., US Patent 4309259, IPC 01 33/107, 1982.
9. Korneev, R.A., Development and Characterization of a Trichlorosilane- Synthesis Process by Hydrogenation of Silicon Tetrachloride in a Hydrogen Plasma, Cand. Sci. (Chem.) Dissertation, Nizhni Novgorod, 2007.