Fabrication of sub-10 nm gap arrays over large areas for plasmonic sensors

Applied Physics Letters

Volumn 99, Issue 26, 2011, Pages

  Siegfried, T ^a   Ekinci, Y ^a,b   Solak, H H ^c   Martin, O J F ^d   Sigg, H ^a  

^a PAUL SCHERRER INSTITUTE   (Switzerland)

^b ETH ZURICH   (Switzerland)

^c EULITHA AG   (Switzerland)

^d EPFL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ENHANCEMENT FACTOR; GAP SIZE; HIGH-ACCURACY; HIGH-THROUGHPUT METHOD; INTERFERENCE LITHOGRAPHY; NANO-GAP; NANOGAPS; PLASMONIC SENSING; PLASMONIC SENSORS; SELF-LIMITING PROCESS; SHADOW EVAPORATION; SURFACE-ENHANCED RAMAN SCATTERING; WAFER-SCALE;

EXPERIMENTS; PLASMONS; RAMAN SCATTERING; SUBSTRATES;

FABRICATION;

EID: 84855676154     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3672045     Document Type: Article

References (24)

1. K. Kneipp, Y. Wang, H. Kneipp, L. T. Perelman, I. Itzkan, R. R. Dasari, and M. S. Feld, Phys. Rev. Lett. 78, 1667 (1997). 10.1103/PhysRevLett.78.1667
2. S. Nie and S. R. Emory, Science 275, 1102 (1997). 10.1126/science.275. 5303.1102 (Pubitemid 27097304)
3. S. J. Tan, M. J. Campolongo, D. Luo, and W. Cheng, Nat. Nanotechnol. 6, 268 (2011). 10.1038/nnano.2011.49
4. M. Rycenga, C. M. Cobley, J. Zeng, W. Li, C. H. Moran, Q. Zhang, D. Qin, and Y. Xia, Chem. Rev. 111, 3669 (2011). 10.1021/cr100275d
5. M. J. Natan, Faraday Discuss. 132, 321 (2006). 10.1039/b601494c (Pubitemid 44448253)
6. J. Zuloaga, E. Prodan, and P. Nordlander, Nano Lett. 9, 887 (2009). 10.1021/nl803811g
7. H. Im, K. C. Bantz, N. C. Lindquist, C. L. Haynes, and S.-H. Oh, Nano Lett. 10, 2231 (2010). 10.1021/nl1012085
8. A. Otto, J. Raman Spectrosc. 37, 937 (2006). 10.1002/jrs.v37:9
9. H. Duan, H. Hu, K. Kumar, Z. Shen, and J. K. W. Yang, ACS Nano 5, 7593 (2011). 10.1021/nn2025868
10. W. Zhu, M. G. Banaee, D. Wang, Y. Chu, and K. B. Crozier, Small 7, 1761 (2010).
11. R. Stosch, F. Yaghobian, T. Weimann, R. J. C. Brown, M. J. T. Milton, and B. Gttler, Nanotechnology 22, 105303 (2011). 10.1088/0957-4484/22/10/105303
12. H. Duan, V. R. Manfrinato, J. K. W. Yang, D. Winston, B. M. Cord, and K. K. Berggren, J. Vac. Sci. Technol. B 28, C6H11 (2010). 10.1116/1.3501359
13. G. S. McCarty, Nano Lett. 4, 1391 (2004). 10.1021/nl049375z (Pubitemid 39186320)
14. R. Negishi, T. Hasegawa, K. Terabe, M. Aono, T. Ebihara, H. Tanaka, and T. Ogawa, Appl. Phys. Lett. 88, 223111 (2006). 10.1063/1.2209208 (Pubitemid 43839253)
15. V. Auzelyte, C. Dais, P. Farquet, D. Grutzmacher, L. J. Heyderman, F. Luo, S. Olliges, C. Padeste, P. K. Sahoo, T. Thomson, J. Micro/Nanolith. MEMS MOEMS 8, 021204 (2009). 10.1117/1.3116559
16. B. Pivnranta, A. Langner, E. Kirk, C. David, and Y. Ekinci, Nanotechnology 22, 375302 (2011). 10.1088/0957-4484/22/37/375302
17. V. Auzelyte, H. H. Solak, Y. Ekinci, R. MacKenzie, J. Vrs, S. Olliges, and R. Spolenak, Microelectron. Eng. 85, 1131 (2008). 10.1016/j.mee.2008.01.064
18. J. G. Bai, W. H. Yeo, and J. H. Chung, Lab Chip 9, 449 (2009). 10.1039/b811400e
19. S. Mller-Pfeiffer, H. van Kranenburg, and J. C. Lodder, Thin Solid Films 213, 143 (1992). 10.1016/0040-6090(92)90489-X
20. K. Naoto, E. Akinori, O. Kiyoshi, S. Ippei, S. Yuichi, and M. Shoji, J. Vac. Sci. Technol. A 19, 153 (2001).
21. M. Moskovits, J. Raman Spectrosc. 36, 485 (2005). 10.1002/jrs.v36:6/7
22. T. Ishida, Y. Nakajima, J. Endo, D. Collard, and H. Fujita, Nanotechnology 20, 065705 (2009). 10.1088/0957-4484/20/6/065705
23. H. H. Solak, C. Dais, and F. Clube, Opt. Express 19, 10686 (2011). 10.1364/OE.19.010686
24. C. Lu and R. H. Lipson, Laser Photonics Rev. 4, 568 (2009). 10.1002/lpor.200810061