Bioinspired Si subwavelength gratings by closely-packed silica nanospheres as etch masks for efficient antireflective surface

Applied Physics B: Lasers and Optics

Volumn 105, Issue 2, 2011, Pages 335-342

  Park, B D ^a   Leem, J W ^a   Yu, J S ^a  

^a Kyung Hee University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ANGLE-DEPENDENT; ANTI-REFLECTION; ANTIREFLECTIVE; ANTIREFLECTIVE PROPERTIES; BIO-INSPIRED; CONE SHAPE; DIFFERENT SIZES; ETCH MASK; GEOMETRIC STRUCTURE; ICP ETCHING; RIGOROUS COUPLED WAVE ANALYSIS; SILICA NANOSPHERES; SUBWAVELENGTH GRATING; THEORETICAL CALCULATIONS; WAVELENGTH REGIONS;

ETCHING; INDUCTIVELY COUPLED PLASMA; MONOLAYERS; NANOSPHERES; OPTICAL BEAM SPLITTERS; OPTIMIZATION; REFLECTION; SILICA;

SILICON;

EID: 84855609235     PISSN: 09462171     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00340-011-4541-0     Document Type: Article

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