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Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 30, Issue 1, 2012, Pages

Molecular layer deposition of polyethylene terephthalate thin films

(3) Ivanova, Tatyana V a Maydannik, Philipp S a Cameron, David C a

a LAPPEENRANTA UNIVERSITY OF TECHNOLOGY (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

3-AMINOPROPYLTRIETHOXYSILANE; AFM; AROMATIC GROUP; ATTENUATED TOTAL REFLECTANCE; DEPOSITED FILMS; FUNCTIONALIZED; LINEAR GROWTH RATE; MOLECULAR LAYER DEPOSITION; NUMBER OF CYCLES; SILICON SUBSTRATES; SILICON SURFACES; SURFACE CHEMICAL REACTIONS; TEMPERATURE RANGE; TEREPHTHALOYL CHLORIDE;

ATOMIC LAYER DEPOSITION; CHLORINATION; CHLORINE COMPOUNDS; DEPOSITION; ETHYLENE; ETHYLENE GLYCOL; FILM GROWTH; FLUORINE; POLYETHYLENE TEREPHTHALATES; POLYETHYLENES; SELF ASSEMBLY; SILICON COMPOUNDS; SPECTROSCOPIC ELLIPSOMETRY; SURFACE MORPHOLOGY; SURFACE REACTIONS; THERMOPLASTICS; THIN FILMS;

VAPOR DEPOSITION;

EID: 84855593208 PISSN: 07342101 EISSN: None Source Type: Journal
DOI: 10.1116/1.3662846 Document Type: Article

Times cited : (36)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.