Photoemission study of carbon depletion from ultralow-carbon doped oxide surfaces during the growth of Mn silicate barrier layers

Journal of Applied Physics

Volumn 110, Issue 12, 2011, Pages

  Casey, P ^a   Bogan, J ^a   Hughes, G ^a  

^a DUBLIN CITY UNIVERSITY   (Ireland)

Author keywords

[No Author keywords available]

Indexed keywords

BARRIER LAYERS; CARBON DEPLETION; CARBON DOPED OXIDES; DOPED OXIDES; GROWTH METHOD; MN OXIDES; SELF-LIMITED; ULTRA-LOW DIELECTRIC CONSTANT;

CARBIDES; CARBON; CARBON FILMS; DIELECTRIC MATERIALS; ECOLOGY; MANGANESE OXIDE; METALLIC COMPOUNDS; OXIDE FILMS; SILICATES; X RAY PHOTOELECTRON SPECTROSCOPY;

MANGANESE;

EID: 84855337373     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3669998     Document Type: Article

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