Effect of electrode and substrate on the fatigue behavior of PZT thick films fabricated by aerosol deposition

Ceramics International

Volumn 38, Issue SUPPL. 1, 2012, Pages

  Han, Guifang ^a   Ryu, Jungho ^a   Yoon, Woon Ha ^a   Choi, Jong Jin ^a   Hahn, Byung Dong ^a   Kim, Jong Woo ^a   Park, Dong Soo ^a  

^a Korea Institute of Material Science   (South Korea)

Author keywords

A. Film; Aerosol deposition (AD); C. Fatigue; D. PZT

Indexed keywords

AEROSOL-DEPOSITION; BOTTOM ELECTRODES; DIELECTRIC AND FERROELECTRIC PROPERTIES; FATIGUE BEHAVIOR; LEAD-ZIRCONATE-TITANATE FILMS; PT ELECTRODE; PZT; PZT FILM; PZT THICK FILMS;

ATMOSPHERIC AEROSOLS; FERROELECTRIC FILMS; FERROELECTRICITY; PLATINUM; RESPIRATORY MECHANICS; SEMICONDUCTING LEAD COMPOUNDS; SUBSTRATES; THICK FILMS; YTTRIA STABILIZED ZIRCONIA; ZIRCONIA;

INTERFACES (MATERIALS);

EID: 84655169847     PISSN: 02728842     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ceramint.2011.04.092     Document Type: Conference Paper

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