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Volumn 59, Issue , 2012, Pages 382-386
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The influence of nitrogen incorporation on the optical properties of anodic Ta 2O 5
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Author keywords
Anodic Ta 2O 5; Band gap; GDOES; Nitrogen incorporation; XPS
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Indexed keywords
AMMONIUM IONS;
ANODIC FILMS;
ANODIC OXIDES;
ANODIC TA 2O 5;
BAND GAPS;
BATH COMPOSITIONS;
DEPTH PROFILE;
FILM COMPOSITION;
FORMATION VOLTAGE;
GDOES;
GLOW-DISCHARGE OPTICAL EMISSION SPECTROSCOPY;
NITROGEN INCORPORATION;
NITROGEN SPECIES;
PH DEPENDENCE;
PHOTOELECTROCHEMICALS;
SUB-BANDS;
XPS ANALYSIS;
AMMONIUM COMPOUNDS;
ANODIC OXIDATION;
ELECTROCHEMISTRY;
EMISSION SPECTROSCOPY;
ENERGY GAP;
GLOW DISCHARGES;
NITROGEN;
OPTICAL EMISSION SPECTROSCOPY;
X RAY PHOTOELECTRON SPECTROSCOPY;
OPTICAL PROPERTIES;
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EID: 84655167167
PISSN: 00134686
EISSN: None
Source Type: Journal
DOI: 10.1016/j.electacta.2011.10.086 Document Type: Article |
Times cited : (27)
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References (17)
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