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Volumn 19, Issue 27, 2011, Pages 25866-25872

Strained germanium thin film membrane on silicon substrate for optoelectronics

Author keywords

[No Author keywords available]

Indexed keywords

ENERGY GAP; GERMANIUM; SEMICONDUCTOR DOPING; STRAINED SILICON; SUBSTRATES;

EID: 84555202860     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.19.025866     Document Type: Article
Times cited : (124)

References (30)
  • 1
    • 36849005415 scopus 로고    scopus 로고
    • Performance comparisons between carbon nanotubes, optical, and Cu for future high-performance on-chip interconnect applications
    • DOI 10.1109/TED.2007.909045
    • K. Koo, H. Cho, P. Kapur, and K. C. Saraswat, "Performance comparisons between carbon nanotubes, optical, and Cu for future high-performance on-chip interconnect applications," IEEE Trans. Electron. Dev. 54(12), 3206-3215 (2007). (Pubitemid 350225928)
    • (2007) IEEE Transactions on Electron Devices , vol.54 , Issue.12 , pp. 3206-3215
    • Koo, K.-H.1    Cho, H.2    Kapur, P.3    Saraswat, K.C.4
  • 2
    • 0000894702 scopus 로고    scopus 로고
    • Rationale and challenges for optical interconnects to electronic chips
    • D. A. B. Miller, "Rationale and challenges for optical interconnects to electronic chips," Proc. IEEE 88(6), 728-749 (2000).
    • (2000) Proc. IEEE , vol.88 , Issue.6 , pp. 728-749
    • Miller, D.A.B.1
  • 4
    • 64549121031 scopus 로고    scopus 로고
    • Comparison of (001), (110) and (111) uniaxial- and biaxial- strained-Ge and strained-Si PMOS DGFETs for all channel orientations: Mobility enhancement, drive current, delay and off-state leakage
    • T. Krishnamohan, D. Kim, T. V. Dinh, A. T. Pham, B. Meinerzhagen, C. Jungemann, and K. C. Saraswat, "Comparison of (001), (110) and (111) Uniaxial- and Biaxial- Strained-Ge and Strained-Si PMOS DGFETs for All Channel orientations: Mobility Enhancement, Drive Current, Delay and Off-State Leakage", IEEE. IEDM. Tech. Digest., 899-892 (2008).
    • (2008) IEEE. IEDM. Tech. Digest. , pp. 899-892
    • Krishnamohan, T.1    Kim, D.2    Dinh, T.V.3    Pham, A.T.4    Meinerzhagen, B.5    Jungemann, C.6    Saraswat, K.C.7
  • 6
    • 0009889927 scopus 로고
    • Direct-gap Ge/GeSn/Si and GeSn/Ge/Si heterostructures
    • R. A. Soref and L. Friedman, "Direct-gap Ge/GeSn/Si and GeSn/Ge/Si heterostructures," Superlattices Microstruct. 14(2-3), 189 (1993).
    • (1993) Superlattices Microstruct. , vol.14 , Issue.2-3 , pp. 189
    • Soref, R.A.1    Friedman, L.2
  • 7
    • 0001038893 scopus 로고    scopus 로고
    • Band structure, deformation potentials, and carrier mobility in strained Si, Ge, and SiGe alloys
    • M. V. Fischetti and S. E. Laux, "Band structure, deformation potentials, and carrier mobility in strained Si, Ge, and SiGe alloys," J. Appl. Phys. 80(4), 2234 (1996).
    • (1996) J. Appl. Phys. , vol.80 , Issue.4 , pp. 2234
    • Fischetti, M.V.1    Laux, S.E.2
  • 8
    • 75649116816 scopus 로고    scopus 로고
    • Band structure and optical gain of tensile-strained germanium based 30 band kp formalism
    • M. El Kurdi, G. Fishman, S. Sauvage, and P. Boucaud, "Band structure and optical gain of tensile-strained germanium based 30 band kp formalism," J. Appl. Phys. 107, 013710 (2010).
    • (2010) J. Appl. Phys. , vol.107 , pp. 013710
    • El Kurdi, M.1    Fishman, G.2    Sauvage, S.3    Boucaud, P.4
  • 9
    • 66349116228 scopus 로고    scopus 로고
    • Room-temperature direct bandgap electroluminesence from Ge-on-Si light-emitting diodes
    • X. Sun, J. Liu, L. C. Kimerling, and J. Michel, "Room-temperature direct bandgap electroluminesence from Ge-on-Si light-emitting diodes," Opt. Lett. 34(8), 1198-1200 (2009).
    • (2009) Opt. Lett. , vol.34 , Issue.8 , pp. 1198-1200
    • Sun, X.1    Liu, J.2    Kimerling, L.C.3    Michel, J.4
  • 10
    • 66849087515 scopus 로고    scopus 로고
    • Room temperature 1.6 microm electroluminescence from Ge light emitting diode on Si substrate
    • S. L. Cheng, J. Lu, G. Shambat, H. Y. Yu, K. Saraswat, J. Vuckovic, and Y. Nishi, "Room temperature 1.6 microm electroluminescence from Ge light emitting diode on Si substrate," Opt. Express 17(12), 10019-10024 (2009).
    • (2009) Opt. Express , vol.17 , Issue.12 , pp. 10019-10024
    • Cheng, S.L.1    Lu, J.2    Shambat, G.3    Yu, H.Y.4    Saraswat, K.5    Vuckovic, J.6    Nishi, Y.7
  • 11
    • 69949112051 scopus 로고    scopus 로고
    • Enhanced direct bandgap emission in germanium by micromechanical strain engineering
    • P. H. Lim, S. Park, Y. Ishikawa, and K. Wada, "Enhanced direct bandgap emission in germanium by micromechanical strain engineering," Opt. Express 17(18), 16358-16365 (2009).
    • (2009) Opt. Express , vol.17 , Issue.18 , pp. 16358-16365
    • Lim, P.H.1    Park, S.2    Ishikawa, Y.3    Wada, K.4
  • 15
    • 77950289389 scopus 로고    scopus 로고
    • Direct-bandgap luminescence at room-temperature from highly-strained Germanium nanocrystals
    • L. Nataraj, F. Xu, and S. G. Cloutier, "Direct-bandgap luminescence at room-temperature from highly-strained Germanium nanocrystals," Opt. Express 18(7), 7085-7091 (2010).
    • (2010) Opt. Express , vol.18 , Issue.7 , pp. 7085-7091
    • Nataraj, L.1    Xu, F.2    Cloutier, S.G.3
  • 17
    • 77955221237 scopus 로고    scopus 로고
    • Mid-infrared photonics in silicon and germanium
    • R. Soref, "Mid-infrared photonics in silicon and germanium," Nat. Photonics 4(8), 495-497 (2010).
    • (2010) Nat. Photonics , vol.4 , Issue.8 , pp. 495-497
    • Soref, R.1
  • 20
    • 84981278178 scopus 로고    scopus 로고
    • Brillouin-zone unfolding of perfect supercells having nonequivalent primitive cells illustrated with a Si/Ge tight-binding parameterization
    • T. B. Boykin, N. Kharche, and G. Klimeck, "Brillouin-zone unfolding of perfect supercells having nonequivalent primitive cells illustrated with a Si/Ge tight-binding parameterization," Phys. Rev. B 76(3), 035310 (2007).
    • (2007) Phys. Rev. B , vol.76 , Issue.3 , pp. 035310
    • Boykin, T.B.1    Kharche, N.2    Klimeck, G.3
  • 21
    • 0042999324 scopus 로고    scopus 로고
    • Diagonal parameter shifts due to nearest-neighbor displacements in empirical tight-binding theory
    • T. B. Boykin, G. Klimeck, R. C. Bowen, and F. Oyafuso, "Diagonal parameter shifts due to nearest-neighbor displacements in empirical tight-binding theory," Phys. Rev. B 66(12), 125207 (2002).
    • (2002) Phys. Rev. B , vol.66 , Issue.12 , pp. 125207
    • Boykin, T.B.1    Klimeck, G.2    Bowen, R.C.3    Oyafuso, F.4
  • 22
    • 19044372579 scopus 로고    scopus 로고
    • Fabrication of high-quality p-MOSFET in Ge Grown heteroepitaxially on Si
    • DOI 10.1109/LED.2005.846578
    • A. Nayfeh, C. O. Chui, T. Yonehara, and K. C. Saraswat, "Fabrication of high-quality p-MOSFET in Ge grown heteroepitaxially on Si," IEEE Electron Device Lett. 26(5), 311-313 (2005). (Pubitemid 40708839)
    • (2005) IEEE Electron Device Letters , vol.26 , Issue.5 , pp. 311-313
    • Nayfeh, A.1    Chui, C.O.2    Yonehara, T.3    Saraswat, K.C.4
  • 23
    • 22944463353 scopus 로고    scopus 로고
    • Strain-induced enhancement of near-infrared absorption in Ge epitaxial layers grown on Si substrate
    • Y. Ishikawa, K. Wada, J. Liu, D. D. Cannon, H.-C. Luan, J. Michel, and L. C. Kimerling, "Strain-induced enhancement of near-infrared absorption in Ge epitaxial layers grown on Si substrate," J. Appl. Phys. 98(1), 013501 (2005).
    • (2005) J. Appl. Phys. , vol.98 , Issue.1 , pp. 013501
    • Ishikawa, Y.1    Wada, K.2    Liu, J.3    Cannon, D.D.4    Luan, H.-C.5    Michel, J.6    Kimerling, L.C.7
  • 24
    • 0031360544 scopus 로고    scopus 로고
    • TMAH etching of silicon and the interaction of etching parameters
    • PII S0924424797015938
    • J. T. L. Thong, W. K. Choi, and C. W. Chong, "TMAH etching of silicon and the interaction of etching parameters," Sens. Actuators A Phys. 63(3), 243-249 (1997). (Pubitemid 127381590)
    • (1997) Sensors and Actuators, A: Physical , vol.63 , Issue.3 , pp. 243-249
    • Thong, J.T.L.1    Choi, W.K.2    Chong, C.W.3
  • 25
    • 0001594585 scopus 로고
    • The compressive stress transition in Al, V, Zr, Nb and W metal films sputtered at low working pressures
    • D. W. Hoffman and J. A. Thornton, "The compressive stress transition in Al, V, Zr, Nb and W metal films sputtered at low working pressures," Thin Solid Films 45(2), 387-396 (1977). (Pubitemid 8624690)
    • (1977) Thin Solid Films , pp. 387-396
    • Hoffman, D.W.1    Thornton, J.A.2
  • 27
    • 79952087642 scopus 로고    scopus 로고
    • +/p junction diodes formed by coimplantation of antimony and phosphorus
    • +/p junction diodes formed by coimplantation of antimony and phosphorus," Appl. Phys. Lett. 98(8), 082112 (2011).
    • (2011) Appl. Phys. Lett. , vol.98 , Issue.8 , pp. 082112
    • Kim, J.1    Bedell, S.W.2    Sadana, D.K.3
  • 28
    • 79959776270 scopus 로고    scopus 로고
    • High n-type antimony dopant activation in germanium using laser annealing for n+/p junction diode
    • G. Thareja, S. Chopra, B. Adams, Y. Kim, S. Moffatt, K. Saraswat, and Y. Nishi, "High n-type antimony dopant activation in germanium using laser annealing for n+/p junction diode," IEEE Electron Device Lett. 32(7), 838-840 (2011).
    • (2011) IEEE Electron Device Lett. , vol.32 , Issue.7 , pp. 838-840
    • Thareja, G.1    Chopra, S.2    Adams, B.3    Kim, Y.4    Moffatt, S.5    Saraswat, K.6    Nishi, Y.7
  • 29
    • 78651289845 scopus 로고    scopus 로고
    • Strong enhancement of direct transition photoluminescence with highly tensile-strained Ge grown by molecular beam epitaxy
    • Y. Huo, H. Lin, R. Chen, M. Makarova, Y. Rong, M. Li, T. I. Kamins, J. Vuckovic, and J. S. Harris, "Strong enhancement of direct transition photoluminescence with highly tensile-strained Ge grown by molecular beam epitaxy," Appl. Phys. Lett. 98(1), 011111 (2011).
    • (2011) Appl. Phys. Lett. , vol.98 , Issue.1 , pp. 011111
    • Huo, Y.1    Lin, H.2    Chen, R.3    Makarova, M.4    Rong, Y.5    Li, M.6    Kamins, T.I.7    Vuckovic, J.8    Harris, J.S.9
  • 30
    • 77955398664 scopus 로고    scopus 로고
    • Accounting for interference, scattering, and electrode absorption to make accurate internal quantum efficiency measurements in organic and other thin solar cells
    • G. F. Burkhard, E. T. Hoke, and M. D. McGehee, "Accounting for interference, scattering, and electrode absorption to make accurate internal quantum efficiency measurements in organic and other thin solar cells," Adv. Mater. (Deerfield Beach Fla.) 22(30), 3293-3297 (2010).
    • (2010) Adv. Mater. (Deerfield Beach Fla.) , vol.22 , Issue.30 , pp. 3293-3297
    • Burkhard, G.F.1    Hoke, E.T.2    McGehee, M.D.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.