An ultra-high precision, high bandwidth torque sensor for microrobotics applications

IEEE International Conference on Intelligent Robots and Systems

Volumn , Issue , 2011, Pages 31-38

  Finio, Benjamin M ^a   Galloway, Kevin C ^a   Wood, Robert J ^a  

^a HARVARD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITIVE DISPLACEMENT SENSORS; DYNAMIC RANGE; FLAPPING-WING; FORCE/TORQUE SENSOR; FRUIT FLIES; HIGH BANDWIDTH; MEMS FORCES; MICRO ROBOTICS; OFF-AXIS LOADS; OUTPUT VOLTAGES; SENSOR DESIGNS; SINGLE-AXIS; TARGET PLATES; THREE DIMENSIONAL BEAM; TORQUE SENSING; TORQUE SENSORS; ULTRA-HIGH;

BANDWIDTH; EXPERIMENTS; INTELLIGENT ROBOTS; MACHINE DESIGN; ROBOTICS; TORQUE; TORQUE METERS;

SENSORS;

EID: 84455169137     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IROS.2011.6048066     Document Type: Conference Paper

References (16)

1. R. J. Wood, "The first takeoff of a biologically inspired at-scale robotic insect," in IEEE Trans. on Robotics, vol. 24, 2008, pp. 341-347.
2. A. Baisch, P. S. Sreetharan, and R. J. Wood, "Biologically inspired locomotion of an insect scale hexapod robot," in Intelligent Robots and Systems (IROS), 2010 In Proc. IEEE/RSJ Int. Conf. on. IEEE, 2010.
3. R. J. Wood, K. J. Cho, and K. Hoffman, "A novel multi-axis force sensor for microrobotics applications," Smart Materials and Structures, vol. 18, p. 125002, 2009.
4. B. M. Finio and R. J. Wood, "Distributed power and control actuation in the thoracic mechanics of a robotic insect," Bioinspiration & Biomimetics, vol. 5, p. 045006, 2010.
5. J. P. Whitney and R. J. Wood, "Aeromechanics of passive rotation in flapping flight," Journal of Fluid Mechanics, vol. 1, no. 1, pp. 1-24, 2010.
6. V. Gass, B. H. Van der Schoot, S. Jeanneret, and N. F. de Rooij, "Micro-torque sensor based on differential force measurement," in Proc. IEEE Int. Conf. on Micro Electro Mechanical Systems, 1994, pp. 241-244.
7. F. Franek and A. Maciszewski, "Torsionselement und ver- wendung eines solchen bei einer einrichtung zur messung von reibungskraften, "Osterreichisches Patent AT 393 167 B, 1991.
8. G. Abraham, R. Duffait, P. Wurmsdobler, A. Matzner, and W. Brenner, "Principles of torque measurement for rotating microactuators," in Sensors, 2002. Proceedings of IEEE, vol. 2, 2002, pp. 1757-1761.
9. A. Vujanic, N. Adamovic, M. Jakovljevic, W. Brenner, G. Popovic, and H. Detter, "Silicon microstructure for precise measurements of mechanical moments," Microelectronics Journal, vol. 31, no. 11-12, p. 975 980, 2000.
10. F. Beyeler, S. Muntwyler, Z. Nagy, M. Moser, and B. J. Nelson, "A multi-axis mems force-torque sensor for measuring the load on a microrobot actuated by magnetic fields," in Intelligent Robots and Systems. IROS IEEE/RSJ Int. Conf. on, 2007, pp. 3803-3808.
11. F. Beyeler, S. Muntwyler, and B. J. Nelson, "A six-axis mems forcetorque sensor with micro-newton and nano-newtonmeter resolution, "Microelectromechanical Systems, Journal of, vol. 18, no. 2, pp. 433-441, April 2009.
12. H. Ota, T. Ohara, Y. Karata, S. Nakasima, and M. Takeda, "Novel micro torque measurement method for microdevices," Journal of Micromechanics and Microengineering, vol. 11, no. 5, p. 595, 2001.
13. C. Zwyssig, S. D. Round, and J. W. Kolar, "Analytical and experimental investigation of a low torque, ultra-high speed drive system,"in Industry Applications Conf., 2006. 41st IAS Annual Meeting. Conf. Record of the 2006 IEEE, vol. 3, oct. 2006, pp. 1507-1513.
14. D. Mathieson, B. J. Robertson, U. Beerschwinger, S. J. Yang, R. L. Reuben, A. J. Addlesee, J. Spencer, and R. A. Lawes, "Micro torque measurements for a prototype turbine," Journal of Micromechanics and Microengineering, vol. 4, no. 3, p. 129, 1994. [Online]. Available: http://stacks.iop.org/0960-1317/4/i=3/a=006
15. B. P. Trease, Y. M. Moon, and S. Kota, "Design of large-displacement compliant joints," Journal of Mechanical Design, vol. 127, p. 788, 2005.
16. X. Deng, L. Schenato, and S. Sastry, "Flapping flight for biomimetic robotic insects: Part II-flight control design," IEEE Trans. on Robotics, vol. 22, no. 4, pp. 789-803, 2006. (Pubitemid 44263865)