Design of steady-state isothermal gas distribution systems consisting of long tubes in the whole range of the Knudsen number

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 29, Issue 6, 2011, Pages

  Misdanitis, Serafeim ^a   Valougeorgis, Dimitris ^a  

^a UNIVERSITY OF THESSALY   (Greece)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTATIONAL EFFORT; GAS DISTRIBUTION; GAS PIPES; KNUDSEN NUMBERS; LINEAR KINETICS; LONG TUBES; MASS FLOW RATE; NOVEL ALGORITHM; PIPE ELEMENTS; PIPE NETWORKS; PRESSURE HEADS; SINGLE TUBES; VACUUM CONDITION;

ALGORITHMS; KINETIC THEORY; KINETICS; TUBES (COMPONENTS); VACUUM; VACUUM TECHNOLOGY;

GASES;

EID: 84255200528     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.3645582     Document Type: Article

References (18)

1. F. Sharipov and V. Seleznev, J. Phys. Chem. Ref. Data 27, 657 (1998). 10.1063/1.556019
2. M. Hasegawa and Y. Sone, J. Vac. Soc. Jpn. 31, 416 (1988). 10.3131/jvsj.31.416
3. K. Aoki, Numerical analysis of rarefied gas flows by finite-difference method, in Rarefied Gas Dynamics, edited by, E. P. Muntz, D. P. Weaver, and, D. H. Campbell, (AIAA, Washington DC, 1989), Vol. 118, pp. 297.
4. F. Sharipov, J. Vac. Sci. Technol. A 17, 3062 (1999). 10.1116/1.582006
5. I. Graur and F. Sharipov, Eur. J. Mech. B/Fluids 27, 335 (2008). 10.1016/j.euromechflu.2007.07.003 (Pubitemid 351474396)
6. G. Breyiannis, S. Varoutis, and D. Valougeorgis, Eur. J. Mech. B/Fluids 27, 609 (2008). 10.1016/j.euromechflu.2007.10.002
7. S. Naris and D. Valougeorgis, Eur. J. Mech, B/Fluids 27, 810 (2008). 10.1016/j.euromechflu.2008.01.002
8. F. Sharipov and V. Seleznev, J. Vac. Sci. Technol. A 12, 2933 (1994). 10.1116/1.578969 (Pubitemid 24823868)
9. S. Varoutis, S. Naris, V. Hauer, C. Day, and D. Valougeorgis, J. Vac. Sci. Technol. A 27, 89 (2009). 10.1116/1.3043463
10. L. Szalmas, J. Pitakarnnop, S. Geoffroy, S. Colin, and D. Valougeorgis, Microfluid Nanofluid 9, 1103 (2010). 10.1007/s10404-010-0631-2
11. A. J. Osiadacz, Int. J. Syst. Sci. 19, 2395 (1988). 10.1080/ 00207728808964126
12. G. P. Greyvenstein and D. P. Laurie, Int. J. Numer. Meth. Eng. 37, 3685 (1994). 10.1002/nme.v37:21
13. M. C. Potter and D. C. Wiggert, Mechanics of Fluids, 2nd ed. (Prentice Hall, New York, 1997).
14. S. Dushman and J. M. Lafferty, Scientific Foundations of Vacuum Technique, 2nd ed. (Wiley, New York, 1962).
15. S. Ohta, N. Yoshimura, and H. Hirano, J. Vac. Sci. Technol. A 1, 84 (1983). 10.1116/1.572317 (Pubitemid 13556532)
16. V. Hauer and C. Day, Fusion Eng. Des. 84, 903 (2009). 10.1016/j.fusengdes.2008.12.115
17. F. Sharipov, J. Vac. Sci. Technol. A 14, 2627 (1996). 10.1116/1.579991 (Pubitemid 126102021)
18. K. Jousten, Handbook of Vacuum Technology (Wiley, New York, 2008).