Miniaturization of grayscale images

Journal of Vacuum Science and Technology B

Volumn 29, Issue 6, 2011, Pages

  Yang, Joel K W ^a   Duan, Huigao ^a   Law, Jaslyn B K ^a   Yee Low, Hong ^a   Cord, Bryan ^b  

^a INSTITUTE OF MATERIALS RESEARCH AND ENGINEERING   (Singapore)

^b UNIVERSITY OF MINNESOTA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON BEAM LITHOGRAPHY; MINIATURE INSTRUMENTS; PIXELS; SCANNING ELECTRON MICROSCOPY;

ANTI-COUNTERFEIT; BINARY PATTERNS; GRAY-SCALE IMAGES; GRAY-SCALE LITHOGRAPHY; NANO-METER SCALE; NANOPHOTONIC DEVICES; ORIGINAL IMAGES; SEMICONDUCTOR INDUSTRY;

SUBSTRATES;

EID: 84255189844     PISSN: 21662746     EISSN: 21662754     Source Type: Journal    
DOI: 10.1116/1.3660790     Document Type: Article

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