3D fabrication by stacking prepatterned, rigidly held membranes

Journal of Vacuum Science and Technology B

Volumn 29, Issue 6, 2011, Pages

  Patel, Amil A ^a   Fucetola, Corey P ^a   Moon, Euclid E ^a   Smith, Henry I ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

RIGIDITY; TETHERLINES;

3D FABRICATION; 3D STRUCTURE; HIGH RESOLUTION; SINX MEMBRANES; SPECIFIC LOCATION; SQUARE ARRAY; THIN MEMBRANE; THREE-LAYER;

FABRICATION;

EID: 84255168741     PISSN: 21662746     EISSN: 21662754     Source Type: Journal    
DOI: 10.1116/1.3643762     Document Type: Article

References (11)

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