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Volumn 105, Issue 3, 2011, Pages 661-671
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Design challenges for matrix assisted pulsed laser evaporation and infrared resonant laser evaporation equipment
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Author keywords
[No Author keywords available]
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Indexed keywords
ACTIVE AREA;
BOND-BREAKING;
CAPITAL COSTS;
COMMERCIAL EQUIPMENT;
CRITICAL ATTRIBUTES;
DEPOSITION CHAMBERS;
DEPOSITION PROCESS;
DESIGN CHALLENGES;
ER:YAG LASERS;
EXCIMERS;
GATE VALVE;
HIGH ENERGY;
HIGH-POWER;
IMPROVED PROCESS;
INCIDENT LASER RADIATION;
LASER DEPOSITIONS;
LASER EVAPORATION;
MATRIX;
MATRIX ASSISTED PULSED LASER EVAPORATION;
MULTIPLE TARGETS;
MULTITARGET;
NAVAL RESEARCH;
NAVAL RESEARCH LABORATORY;
ND : YAG LASERS;
ORGANIC MATERIALS;
ORGANIC STRUCTURES;
ORGANIC THIN FILMS;
OVERALL DESIGN;
OXIDE MATERIALS;
PHOTO-DECOMPOSITION;
PHOTOCHEMICAL MECHANISM;
PHOTOTHERMAL EFFECTS;
POLYMER CHAINS;
POLYMER MATERIALS;
POLYMER THICKNESS;
RESEARCH INSTITUTIONS;
SALIENT FEATURES;
SAMPLE HOLDERS;
SCIENTIFIC RESULTS;
SOLID POLYMERS;
TARGET SURFACE;
THIN-FILM DEPOSITION TECHNIQUE;
UV LASERS;
VANDERBILT UNIVERSITY;
VERTICAL POSITIONS;
VIBRATION BANDS;
WAVELENGTH LASERS;
WIDE TUNING RANGE;
DEPOSITION;
EQUIPMENT;
ERBIUM;
EVAPORATION;
EXPERIMENTS;
FILM GROWTH;
FILM PREPARATION;
FREE ELECTRON LASERS;
HIGH ENERGY LASERS;
INFRARED LASERS;
LASER PULSES;
LASER TUNING;
MATERIALS;
MULTILAYER FILMS;
MULTILAYERS;
MULTIPHOTON PROCESSES;
NEODYMIUM LASERS;
ORGANIC LASERS;
PHASE TRANSITIONS;
PHOTONS;
POLYMER FILMS;
POLYMERS;
PULSED LASER DEPOSITION;
QUARTZ;
RESEARCH LABORATORIES;
RESERVOIRS (WATER);
SOCIETIES AND INSTITUTIONS;
SURFACES;
WATER VAPOR;
PULSED LASERS;
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EID: 83555174657
PISSN: 09478396
EISSN: 14320630
Source Type: Journal
DOI: 10.1007/s00339-011-6611-x Document Type: Article |
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Times cited : (14)
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References (9)
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