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Volumn , Issue , 2011, Pages
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Sensing and MEMS devices in thin-film SOI MOS technology
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Author keywords
[No Author keywords available]
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Indexed keywords
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EID: 83455213512
PISSN: 1078621X
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1109/SOI.2011.6081789 Document Type: Conference Paper |
Times cited : (1)
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References (0)
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