Preparation of Bi4Ti3O12 thin films by electron cyclotron resonance sputtering

Integrated Ferroelectrics

Volumn 12, Issue 2-4, 1996, Pages 215-223

  Maiwa, Hiroshi ^a   Ichinose, Noboru ^b  

^a SHONAN INSTITUTE OF TECHNOLOGY   (Japan)

^b WASEDA UNIVERSITY   (Japan)

Author keywords

Bi4Ti3O12; Electron cyclotron resonance; Ferroelectric thin films; Layered peroviskite structure; Non volatile memory; Sputtering

Indexed keywords

BISMUTH COMPOUNDS; COERCIVE FORCE; CRYSTAL ORIENTATION; ELECTRON CYCLOTRON RESONANCE; FERROELECTRIC MATERIALS; HYSTERESIS; NONVOLATILE STORAGE; PEROVSKITE; REMANENCE; SPUTTERING; THERMAL EFFECTS; THIN FILMS;

BISMUTH TITANATE;

DIELECTRIC FILMS;

EID: 8344275162     PISSN: 10584587     EISSN: None     Source Type: Journal    
DOI: 10.1080/10584589608013064     Document Type: Article

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